曲面光学元件表面微缺陷透射式偏振检测

国内外近些年来, 对于光学元件表面缺陷的检测技术越来越重视。由于光学元件表面质量的好坏会直接影响到光学系统的性能。文章主要针对曲面光学元件中球面和柱面光学元件表面微缺陷的检测问题, 提出了一种基于光偏振特性的检测方法。利用光学元件表面缺陷与无缺陷区域之间透射光偏振态的差异, 提高整幅图像中缺陷的对比度。首先基于光的偏振理论, 利用偏振片获得偏振照明光, 并采用共焦照明的方式获得同时对焦的曲面光学元件缺陷图像。其后, 利用计算机对缺陷图像进行处理。结果表明采用光的偏振特性对曲面光学元件表面微缺陷的检测, 能够获得高对比度、高分辨率的缺陷特征。此方法很好的提高了曲面光学元件表面微缺陷的检测准确度和检测效率, 结果表明缺陷的检测准确率达到了95％。

Abstract

In recent years, more and more attention has been paid to the detection technology of optical element surface defects. The surface quality of optical element will directly affect the performance of optical system. The detection of micro-defects on the surface of spherical and cylindrical optical elements in curved optical elements are studied, and a detection method based on optical polarization characteristics is proposed. The contrast of defects in the whole image is improved by using the difference of the polarization state of transmitted light between the defect area and the non-defect area. Firstly, based on the polarization theory of light, polarizer is used to obtain polarized illumination light, and confocal illumination is used to obtain the defect image of curved optical element focusing at the same time. Then, using computer to process the defective image. The results show that high contrast and high resolution defect features can be obtained by using polarization characteristics of light to detect micro-defects on the surface of curved optical elements. This method is very good to improve the accuracy and detection efficiency of micro-defects on the surface of curved optical components, and the results show that the detection accuracy of defects reaches 95%.

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王鑫森, 陈晓辉, 段亚凡, 陈嘉慧. 曲面光学元件表面微缺陷透射式偏振检测[J]. 光学技术, 2023, 49(6): 717. WANG Xinsen, CHEN Xiaohui, DUAN Yafan, CHEN Jiahui. ATransmission polarization detection of surface micro-defects of curved optical components[J]. Optical Technique, 2023, 49(6): 717.

曲面光学元件表面微缺陷透射式偏振检测

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