中国激光, 2013, 40 (11): 1107002, 网络出版: 2013-10-24   

辉光放电辅助脉冲激光沉积CNx薄膜的价键结构及机械性能

Valence Bond Structure and Mechanical Properties of CNx Films Prepared by Glow Discharge Assisted Pulsed Laser Deposition
作者单位
浙江工业大学机械工程学院, 浙江 杭州 310014
引用该论文

郑晓华, 宋建强, 杨芳儿, 陈占领. 辉光放电辅助脉冲激光沉积CNx薄膜的价键结构及机械性能[J]. 中国激光, 2013, 40(11): 1107002.

Zheng Xiaohua, Song Jianqiang, Yang Fanger, Chen Zhanling. Valence Bond Structure and Mechanical Properties of CNx Films Prepared by Glow Discharge Assisted Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2013, 40(11): 1107002.

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郑晓华, 宋建强, 杨芳儿, 陈占领. 辉光放电辅助脉冲激光沉积CNx薄膜的价键结构及机械性能[J]. 中国激光, 2013, 40(11): 1107002. Zheng Xiaohua, Song Jianqiang, Yang Fanger, Chen Zhanling. Valence Bond Structure and Mechanical Properties of CNx Films Prepared by Glow Discharge Assisted Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2013, 40(11): 1107002.

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