中国激光, 2018, 45 (8): 0802003, 网络出版: 2018-08-11
355 nm全固态紫外激光直写刻蚀硼硅玻璃微通道 下载: 981次
355 nm All-Solid-State Ultraviolet Laser Direct Writing and Etching of Micro-Channels in Borosilicate Glass
补充材料
李奇思, 梁庭, 雷程, 李旺旺, 林立娜, 杨娇燕, 熊继军. 355 nm全固态紫外激光直写刻蚀硼硅玻璃微通道[J]. 中国激光, 2018, 45(8): 0802003. Li Qisi, Liang Ting, Lei Cheng, Li Wangwang, Lin Lina, Yang Jiaoyan, Xiong Jijun. 355 nm All-Solid-State Ultraviolet Laser Direct Writing and Etching of Micro-Channels in Borosilicate Glass[J]. Chinese Journal of Lasers, 2018, 45(8): 0802003.