中国激光, 2018, 45 (8): 0802003, 网络出版: 2018-08-11
355 nm全固态紫外激光直写刻蚀硼硅玻璃微通道 
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355 nm All-Solid-State Ultraviolet Laser Direct Writing and Etching of Micro-Channels in Borosilicate Glass
图 & 表
图 1. 紫外微加工系统直写刻蚀BF33玻璃的示意图
Fig. 1. Schematic of direct writing and etching of BF33 glass based on ultraviolet micromachining system
图 2. 实验装置实物图。(a)全固态紫外激光器;(b)加工平台;(c)FPS紫外微加工系统
Fig. 2. Physical map of experimental device. (a) All-solid-state ultraviolet laser; (b) processing platform; (c) FPS ultraviolet micromachining system
图 3. 不同能量密度下紫外激光刻蚀硼硅玻璃微通道的表面形貌和微通道深度。(a) 25.28 J·cm-2;(b) 34.55 J·cm-2;(c) 43.70 J·cm-2;(d) 53.23 J·cm-2;(e) 68.84 J·cm-2;(f)微通道深度随激光能量密度的变化
Fig. 3. Surface morphologies and depths of micro-channels in borosilicate glass by ultraviolet laser etching under different energy densities. (a) 25.28 J·cm-2; (b) 34.55 J·cm-2; (c) 43.70 J·cm-2; (d) 53.23 J·cm-2; (e) 68.84 J·cm-2; (f) micro-channel depth versus laser energy density
图 4. 不同重复频率下紫外激光刻蚀硼硅玻璃微通道的表面形貌和微通道深度。(a) 40 kHz;(b) 30 kHz;(c) 25 kHz;(d)微通道深度随激光重复频率的变化
Fig. 4. Surface morphologies and depths of micro-channels in borosilicate glass by ultraviolet laser etching under different repetition frequencies. (a) 40 kHz; (b) 30 kHz; (c) 25 kHz; (d) micro-channel depth versus laser repetition frequency
图 5. 不同扫描速度下紫外激光刻蚀硼硅玻璃微通道的表面形貌和微通道深度。(a) 1.0 mm·s-1;(b) 0.5 mm·s-1;(c) 0.2 mm·s-1;(d)微通道深度随激光扫描速度的变化
Fig. 5. Surface morphologies and depths of micro-channels in borosilicate glass by ultraviolet laser etching under different scanning speeds. (a) 1.0 mm·s-1; (b) 0.5 mm·s-1; (c) 0.2 mm·s-1; (d) micro-channel depth versus laser scanning speed
图 6. 不同扫描间距下紫外激光刻蚀硼硅玻璃微通道的底部形貌。(a) 25 μm;(b) 15 μm;(c) 10 μm
Fig. 6. Bottom morphologies of micro-channels in borosilicate glass by ultraviolet laser etching under different scanning distances. (a) 25 μm; (b) 15 μm; (c) 10 μm
图 7. 不同扫描次数下紫外激光刻蚀硼硅玻璃微通道截面形貌的SEM图和微通道深度/锥度。(a) 1次;(b) 2次;(c) 3次;(d) 4次;(e)微通道深度随激光扫描次数的变化;(f)微通道锥度随激光扫描次数的变化
Fig. 7. Cross-sectional SEM images and depths/tapers of micro-channels in borosilicate glass by ultraviolet laser etching under different number of scanning. (a) 1 time; (b) 2 times; (c) 3 times; (d) 4 times; (e) micro-channel depth versus number of laser scanning; (f) micro-channel taper versus number of laser scanning
表 1激光器脉宽与重复频率间的关系
Table1. Correspondence between laser pulse width and repetition frequency
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李奇思, 梁庭, 雷程, 李旺旺, 林立娜, 杨娇燕, 熊继军. 355 nm全固态紫外激光直写刻蚀硼硅玻璃微通道[J]. 中国激光, 2018, 45(8): 0802003. Li Qisi, Liang Ting, Lei Cheng, Li Wangwang, Lin Lina, Yang Jiaoyan, Xiong Jijun. 355 nm All-Solid-State Ultraviolet Laser Direct Writing and Etching of Micro-Channels in Borosilicate Glass[J]. Chinese Journal of Lasers, 2018, 45(8): 0802003.
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