Optical properties and microstructure of Ta<sub>2</sub>O<sub>5</sub> thin films prepared by oblique angle deposition

Xiudi Xiao; Guoping Dong; Hongbo He; Hongji Qi; Zhengxiu Fan; Jianda Shao

Chinese Optics Letters, 2009, 7 (10): 967, Published Online: Oct. 16, 2009

Optical properties and microstructure of Ta₂O₅ thin films prepared by oblique angle deposition

Xiudi Xiao ^1,2Guoping Dong ^1,2Hongbo He ¹Hongji Qi ^1,3Zhengxiu Fan ¹Jianda Shao ¹

Author Affiliations

¹ Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² Graduate University of Chinese Academy of Sciences, Beijing 100049, China

³ Shanghai Daheng Optics and Fine Mechanics Co., Ltd., Shanghai 201800, China

Suppl. Mat.

Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao. Optical properties and microstructure of Ta₂O₅ thin films prepared by oblique angle deposition[J]. Chinese Optics Letters, 2009, 7(10): 967.

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