Chinese Optics Letters, 2009, 7 (10): 967, Published Online: Oct. 16, 2009
Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition
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Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao. Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition[J]. Chinese Optics Letters, 2009, 7(10): 967.
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