Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition
[1] K. Robbie, G. Beydaghyan, T. Brown, C. Dean, J. Adams, and C. Buzea, Rev. Sci. Instrum. 75, 1089 (2004).
[2] J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nature Photon. 1, 176 (2007).
[3] A. C. van Popta, M. H. Hawkeye, J. C. Sit, and M. J. Brett, Opt. Lett. 29, 2545 (2004).
[4] K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie, Appl. Opt. 42, 4212 (2003).
[5] Q. Zhou, Z. Li, Y. Yang, and Z. Zhang, J. Phys. D 41, 152007 (2008).
[6] R. A. Tripp, R. A. Dluhy, and Y. Zhao, Nanotoday 3, (3-4) 31 (2008).
[7] A. K. Kalkan, M. R. Henry, H. Li, J. D. Cuiffi, D. J. Hayes, C. Palmer, and S. J. Fonash, Nanotechnol. 16, 1383 (2005).
[8] H. Kimura, J. Mizuki, S. Kamiyama, and H. Suzuki, Appl. Phys. Lett. 66, 2209 (1995).
[9] E. Atanassova, N. Stojadinovic, A. Paskaleva, D. Spassov, L. Vracar, and M. Georgieva, Semicond. Sci. Technol. 23, 075017 (2008).
[10] M. Matsui, H. Nagayoshi, G. Muto, S. Tanimoto, K. Kuroiwa, and J. Tarui, Jpn. J. Appl. Phys. 29, 62 (1990).
[11] P. Kofstad, J. Electrochem. Soc. 109, 776 (1962).
[12] J. D. T. Kruschwitz and W. T. Pawlewicz, Appl. Opt. 36, 2157 (1997).
[13] F. Rubio, J. Denis, J. M. Albella, and J. M. Martinez-Duart, Thin Solid Films 90, 405 (1982).
[14] C. Xu, H. Dong, Q. Xiao, J. Ma, Y. Jin, and J. Shao, Chinese J. Lasers (in Chinese) 35, 1595 (2008).
[15] X. He, J. Wu, L. Zhao, J. Meng, X. Gao, and X. Li, Solid State Commun. 147, 90 (2008).
[16] S. Wang, X. Fu, G. Xia, J. Wang, J. Shao, and Z. Fan, Appl. Surf. Sci. 252, 8734 (2006).
[17] J. Ni, Y. Zhu, Q. Zhou, and Z. Zhang, J. Am. Ceram. Soc. 91, 3458 (2008).
[18] R. Messier, V. C. Venugopal, and P. D. Sunal, J. Vac. Sci. Technol. A 18, 1538 (2000).
[19] J. A. Thornton, Annu. Rev. Mater. Sci. 7, 239 (1977).
[20] B. Dick and M. J. Brett, in Encyclopedia of Nanoscience and Nanotechnology. vol. 6 (American Scientific Publishers, Valencia, 2004) pp. 703-725.
[21] J. M. Nieuwenhuizen and H. B. Haanstra, Philips Tech. Rev. 27, 87 (1966).
[22] R. N. Tait, T. Smy, and M. J. Brett, Thin Solid Films 226, 196 (1993).
[23] Y. Wang, W. Zhang, Z. Fan, J. Huang, Y. Jin, J. Yao, and J. Shao, Chinese J. Lasers (in Chinese) 35, 760 (2008).
[24] V. Janicki, J. Sancho-Parramon, and H. Zorc, Thin Solid Films 516, 3368 (2008).
[25] G. Beydaghyan, K. Kaminska, T. Brown, and K. Robbie, Appl. Opt. 43, 5343 (2004).
[26] J. Wang, J. Shao, and Z. Fan, Opt. Commun. 247, 107 (2005).
Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao. Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition[J]. Chinese Optics Letters, 2009, 7(10): 967.