中国光学, 2015, 8 (4): 567, 网络出版: 2016-01-25
白光干涉测量超薄透明电极ITO薄膜的厚度
Measurement of ITO transparent electrode film thickness with white-light interferometer
引用该论文
陈凯, 雷枫, 伊藤雅英. 白光干涉测量超薄透明电极ITO薄膜的厚度[J]. 中国光学, 2015, 8(4): 567.
CHEN Kai, LEI Feng, ITOH Masahide. Measurement of ITO transparent electrode film thickness with white-light interferometer[J]. Chinese Optics, 2015, 8(4): 567.
陈凯, 雷枫, 伊藤雅英. 白光干涉测量超薄透明电极ITO薄膜的厚度[J]. 中国光学, 2015, 8(4): 567. CHEN Kai, LEI Feng, ITOH Masahide. Measurement of ITO transparent electrode film thickness with white-light interferometer[J]. Chinese Optics, 2015, 8(4): 567.