白光干涉测量超薄透明电极ITO薄膜的厚度
陈凯, 雷枫, 伊藤雅英. 白光干涉测量超薄透明电极ITO薄膜的厚度[J]. 中国光学, 2015, 8(4): 567.
CHEN Kai, LEI Feng, ITOH Masahide. Measurement of ITO transparent electrode film thickness with white-light interferometer[J]. Chinese Optics, 2015, 8(4): 567.
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陈凯, 雷枫, 伊藤雅英. 白光干涉测量超薄透明电极ITO薄膜的厚度[J]. 中国光学, 2015, 8(4): 567. CHEN Kai, LEI Feng, ITOH Masahide. Measurement of ITO transparent electrode film thickness with white-light interferometer[J]. Chinese Optics, 2015, 8(4): 567.