应用激光, 2017, 37 (4): 586, 网络出版: 2017-10-12
248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究
The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser
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杨桂栓, 陈虹, 陈涛. 248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究[J]. 应用激光, 2017, 37(4): 586.
Yang Guishuan, Chen Hong, Chen Tao. The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser[J]. APPLIED LASER, 2017, 37(4): 586.
杨桂栓, 陈虹, 陈涛. 248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究[J]. 应用激光, 2017, 37(4): 586. Yang Guishuan, Chen Hong, Chen Tao. The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser[J]. APPLIED LASER, 2017, 37(4): 586.
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