248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究
杨桂栓, 陈虹, 陈涛. 248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究[J]. 应用激光, 2017, 37(4): 586.
Yang Guishuan, Chen Hong, Chen Tao. The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser[J]. APPLIED LASER, 2017, 37(4): 586.
[1] 郑小林, 鄢佳文, 胡宁, 等.微流控芯片的材料与加工方法研究进展［J］ .传感器与微系统, 2011, 30(6): 1-4+7.
[2] 耿利娜, 全宗良, 侯妮, 等.蛋白质分离玻璃微流控芯片的制作方法［J］ .北京理工大学学报, 2013, 33(4): 436-440.
[3] HE SHENGGUAN, CHEN FENG, LI KEYIN, et al.Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica［J］ .Optics Letters., 2012, 37(18): 3825-3827.
[4] MASUDA M, SUGIOKA K, CHENG Y, et al.3-D microstructuring inside photosensitive glass by femtosecond laser excitation［J］ .Applied Physics A, 2003, 76(5): 857-860.
[5] 翟立斌, 赵宏亮, 陈继民.玻璃材料微通道的三倍频激光微加工研究［J］ .应用激光, 2006, 26(6): 365-368.
[6] 戴玉堂, 徐刚, 崔健磊.透明材料的深紫外激光三维微刻蚀工艺［J］ .应用激光, 2009, 29(5): 411-414.
[7] 江超, 王又青.KrF准分子激光精密加工K9光学玻璃的实验研究［J］ .电加工与模具, 2003(2): 33-35+62.
[8] IHLEM ANN J, WOLFF B, SIMON P.Nanosecond and femtosecond excimer laser ablation of fused silica［J］.Applied Physics A, 1992,54(4): 363-368.
杨桂栓, 陈虹, 陈涛. 248 nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究[J]. 应用激光, 2017, 37(4): 586. Yang Guishuan, Chen Hong, Chen Tao. The Study on Low Cracking of Soda-lime Glass Micro-Groove Etched by 248 nm Excimer Laser[J]. APPLIED LASER, 2017, 37(4): 586.
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