连续光谱的同步辐射光通过入射狭缝照射到光栅单色器后，在出射的单色光λ中总是不可避免的混有基波λ的高级次谐波λn=λ/n。采用自制的3300 1p/mm 金膜自支撑透射光栅和美国IRD公司的AXUVI00G光电二极管探测器，定量研究了光谱辐射标准和计量光束线在5~40 nm波段的高次谐波。研究了Zr，Si，Al和Al/Mg/Al滤片在不同能量范围对高次谐波的抑制作用，给出了实验数据和曲线。在5~40 nm波段，适当的选用Zr，Si，Al和Al/Mg/Al 滤片可有效地抑制高次谐波，在5~34 nm波段将高次谐波与基波的信号强度比例控制在8.06%以内，经量子效率修正后小于3.08%，在35~40波段经探测器量子效率修正后高次谐波比例小于10.00%。

The monochromatic synchrotron radiation spectra of spherical grating monochromator (SGM) working in soft Xray and vacuum ultraviolet (VUV) region are often contaminated by significant amount of higherorder harmonics. They cannot be suppressed completely even by suitable filters. Higherorder contributions in the spectral radiation standard and metrology beamline are researched by using transmission grating (3300 lp/mm made in house) and IRD AXUVI00G (USA) photodiode detector. The exit beam is dispersed with the transmission grating behind exit slit of the monochromator, and the contributions of the different orders are analyzed. In wavelength region between 5 nm and 34 nm with proper Al, Si and Zr filters, the contributions of higherorder intensity are less than 8.06%. After modified by quantum efficiency of the detector, the higherorder contributions are restricted to less than 3.08%. In wavelength region between 35 and 40 nm with Al/Mg/A filter, the higherorder contributions are restricted to less than 10.00% after modified by quantum efficiency of the detector.