中国光学, 2012, 5 (4): 401, 网络出版: 2012-08-15
光刻投影物镜可变光阑的结构设计与分析
Design and analysis of iris diaphragm structure in lithographic projection objective
补充材料
孙振, 巩岩. 光刻投影物镜可变光阑的结构设计与分析[J]. 中国光学, 2012, 5(4): 401. SUN Zhen, GONG Yan. Design and analysis of iris diaphragm structure in lithographic projection objective[J]. Chinese Optics, 2012, 5(4): 401.
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