[1] 董莉莉, 金宏.采用可变光阑的自动调光系统的稳定性分析［J］.光学 精密工程, 1999,7(1):100-104.

    DONG L L,JIN H. The stabilization analysis of automatically adjustable optical-intensity system using iris diaphragm［J］. Opt. Precision Eng.,1999,7(1):100-104.(in Chinese)

[2] 李为,李德熊,陈南光.摄影仪器［M］.北京:北京理工大学出版社, 1993.

    LI W,LI D X,CHEN N G. Photography Apparatus［M］. Beijing:Beijing University of Technology,1993.(in Chinese)

[3] 王义龙.特殊口径调光系统的研制及其实验研究［D］.哈尔滨:哈尔滨工业大学, 2007.

    WANG Y L. Development of the special caliber dimming system and its experimental study［D］. Harbin:Graduate Harbin Institute of Technology,2007.(in Chinese)

[4] 巩岩, 张巍.光刻曝光系统的现状与发展［J］.中国光学与应用光学, 2008,1(1):25-35.

    GONG Y,ZHANG W. Present status and progress in 193 nm exposure system in lithography［J］. Chinese J. Opt. Appl. Opt.,2008,1(1):25-35.(in Chinese)

[5] 王丽萍.极紫外投影光刻光学系统［J］.中国光学与应用光学, 2010,3(5):452-461.

    WANG L P. Optical system of extreme ultraviolet lithography［J］. Chinese J. Opt. Appl. Opt.,2010,3(5):452-461.(in Chinese)

[6] 《光学仪器设计手册》编辑组.光学仪器设计手册［M］.北京:国防工业出版社, 1972.

    Editor group of 《Optics Apparatus Design Manual》. Optics Apparatus Design Manual［M］. Beijing:National Defence Industry Press,1972.(in Chinese)

[7] 常远, 甄万才.齿轮传动与蜗轮蜗杆传动性能比较与消隙机构［J］.电子工业专用设备, 2007,(144):74-76.

    CHANG Y,ZHEN W C. Gear and worm-wheel steering gear′s performances comparison and backlash eliminated structure［J］. Equipment Electronic Products Manufacturing,2007,(144):74-76.(in Chinese)

[8] 程文冬, 曹岩.直齿轮啮合疲劳强度的有限元仿真与失效分析［J］.西安工业大学学报, 2010,30(3):239-242.

    CHENG W D,CAO Y. Simulation study of meshing fatigue strength of involute cylinder gear［J］. J. Xi′an Technological University,2010,30(3):239-242.(in Chinese)