一维版图的快速光刻仿真
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谢春蕾, 史峥, 林斌. 一维版图的快速光刻仿真[J]. 光学学报, 2013, 33(11): 1111001. Xie Chunlei, Shi Zheng, Lin Bin. Fast Lithography Simulation for One-Dimensional Layout[J]. Acta Optica Sinica, 2013, 33(11): 1111001.