激光直写机床系统正交性误差影响下计算全息图相位分析

计算全息图(CGH)在非球面、自由曲面等光学元件的高精度检测中发挥着重要作用。激光直写机床导轨的正交性误差会影响CGH 图案的绘制精度，进而在面形检测结果中引入像散误差。为定量研究激光直写机床导轨正交误差对CGH检测结果的影响，利用标量衍射理论，建立激光直写机床导轨角度误差模型，以CGH对准区域图案为例对机床导轨正交性误差的影响进行分析。实验结果表明在机床导轨正交性误差为800 μrad时的均方根（RMS）值、峰谷值（PV）值和Zernike像散系数与理论值分别相差2.26%、2.33%、1.72%，从而验证所建立误差模型的正确性。

Abstract

Computer-generated hologram (CGH) plays an important role in testing high-accuracy optical elements such as aspheric and freeform surfaces. However, the orthogonality error induced by the rails of direct laser writing systems will deteriorate the fabrication accuracy of CGH, and thus introduce astigmatism error to the testing results of surface shape. To quantitatively study the influence of orthogonality error induced by the rails of direct laser writing systems on testing results of CGH, a model of rails′ angle error of direct laser writing systems using scalar diffraction theory is established, and the impact of orthogonality error on the alignment section of the CGH is analyzed. The experimental results indicate that there is 2.26%, 2.33% and 1.72% deviation in root mean square(RMS), peak valley(PV) and Zernike astigmatic coefficient respectively with theoretical results when orthogonality error is 800 μrad, which verifies the correctness of the established error model.

参考文献

[1] Wyant J C, Bennett V P. Using computer generated holograms to test aspheric wavefronts[J]. Appl Optics, 1972, 11(12): 2833-2839.

[2] 高松涛, 隋永新, 杨怀江. 用计算全息图对非球面的高精度检测与误差评估[J]. 光学学报, 2013, 33(6): 0612003.

Gao Songtao, Sui Yongxin, Yang Huaijiang. High precise testing of asphere with computer-generated-hologram and error evaluation[J]. Acta Optica Sinica, 2013, 33(6): 0612003.

[3] 黎发志, 郑立功, 闫峰, 等. 自由曲面的CGH光学检测方法与实验[J]. 红外与激光工程, 2012, 41(4): 1052-1056.

Li Fazhi, Zheng Ligong, Yan Feng, et al. Optical testing method and its experiment on freedom surface with computer-generated hologram[J]. Infrared and Laser Engineering, 2012, 41(4): 1052-1056.

[4] 朱德燕, 张学军. 高精度位相型计算全息图的设计[J]. 光学学报, 2015, 35(4): 0712002.

Zhu Deyan, Zhang Xuejun. Design of high-precision phase computer-generated-hologram[J]. Acta Optica Sinica, 2015, 35(4): 0712002.

[5] Burge J H, Kot LB, Martin H M, et al. Alternate surface measurements for GMT primary mirror segments[C]. SPIE, 2006, 6273: 62732T.

[6] Martin H M, Burge J H, Vecchio C D, et al. Optical fabrication of the MMT adaptive secondary mirror[C]. SPIE, 2000, 4007: 502-507.

[7] Salgueiro J R, Moreno V, Liares J. Model of linewidth for laser writing on a photoresist[J]. Applied Optics, 2002, 41(5): 895-901.

[8] Yang G G, Shen Y B. Laser direct writing system and its lithography properties[C]. SPIE, 1998, 3550: 409-418.

[9] Cai W R, Zhou P, Zhao C Y, et al. The diffraction optics calibrator: design and construction[J]. Opt Eng, 2013, 8839: 883907.

[10] Zhou P, Burge J. Coupling of surface roughness to the performance of computer-generated holograms[J]. Applied Optics, 2007, 46(26): 6572-6576.

[11] Zhou P, Burge J H. Optimal design of computer-generated holograms to minimize sensitivity to fabrication errors[J]. Opt Express, 2007, 15(23): 15410-15417.

[12] Chang Y C, Zhou P, Burge J H. Analysis of phase sensitivity for binary computer-generated holograms[J]. Appl Opt, 2006, 45(18): 4223-4234.

[13] Zhao C Y, Burge J H. Optical testing with computer generated holograms: comprehensive error analysis[C]. SPIE, 2013, 8838: 88380H.

[14] Stuerwald S. Error compensation in computer generated hologram-based form testing of aspheres[J]. Appl Opt, 2014, 53(35): 8249-8255.

郑立功, 郝腾, 国成立, 王若秋, 张志宇. 激光直写机床系统正交性误差影响下计算全息图相位分析[J]. 光学学报, 2016, 36(10): 1012005. Zheng Ligong, Hao Teng, Guo Chengli, Wang Ruoqiu, Zhang Zhiyu. Phase Analysis in Computer-Generated Hologram Induced by Direct Laser Writing Systems with Orthogonality Error[J]. Acta Optica Sinica, 2016, 36(10): 1012005.

激光直写机床系统正交性误差影响下计算全息图相位分析

关于本站 Cookie 的使用提示

全站搜索

激光直写机床系统正交性误差影响下计算全息图相位分析

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索