激光与光电子学进展, 2014, 51 (9): 092204, 网络出版: 2014-08-15   

基于小物镜系统的热像差影响因素分析 下载: 564次

Analysis of Influence Factors of Thermal Aberrations Based on the Small Lens System
作者单位
中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033
摘要
光机热集成分析是光机结构设计中的重要环节,对光学系统像质的预测与补偿有着重要的参考价值。针对小物镜系统,进行光机热集成分析,结果表明该系统产生的热像差较大,影响系统光学性能,其中温度升高导致折射率变化引入的系统热像差较大;结构热变形引入的系统热像差较小,可以忽略;镜片与支撑结构之间的导热、上下窗口的空气扰动、机械结构外表面的环境对流也会存在一定影响,但影响较小。由此可知系统热像差的主要影响因素是热载的大小,设计过程中减少透镜厚度及材料吸收率,降低系统热载,是减小光学系统热像差最为有效的途径。
Abstract
Thermal structural optical integrated analysis is an effective way to estimate optical image quality during optical and mechanical design stage. Thermal structural optical integrated analysis of a small lens system is conducted. The results indicate that thermal aberrations of the system are higher, affecting optical properties of the system. Contribution to the thermal aberrations induced by change of refractive index is larger than that by surface deformation. Thermal conductance between the lens and the support structures, air turbulence in the upper and lower windows, and environmental convection of the outer surface of the mechanical structure influence the thermal aberrations finitely, and the primary influence factor is thermal load. Reducing thickness of the lens and absorption rate of materials will decrease thermal load and thermal aberrations of the system decreased effectively.
参考文献

[1] 刘菲, 李艳秋. 大数值孔径产业化极紫外投影光刻物镜设计[J]. 光学学报, 2011, 31(2): 0222003.

    Liu Fei, Li Yanqiu. Design of high numerical aperture projection objective for industrial extreme ultraviolet lithography[J]. Acta Optica Sinica, 2011, 31(2): 0222003.

[2] Toshiharu Nakashima, Yasuhiro Ohmura, Taro Ogata, et al.. Thermal aberration control in projection lens [C]. SPIE, 2008, 6924: 69241V.

[3] Scott Halle, Michael Crouse, Aiqin Jiang, et al.. Lens heating challenges for negative tone develop layers with freeform illumination: a comparative study of experimental vs. simulated results [C]. SPIE, 2012, 8326: 832607.

[4] 石进峰, 吴清文, 张建萍, 等. 高空高速航空相机光学窗口的热光学分析[J]. 光学学报, 2012, 32(4): 0422004.

    Shi Jinfeng, Wu Qingwen, Zhang Jianping, et al.. Thermal-optical analysis for optical window of high-altitude and high-speed aerial camera [J]. Acta Optica Sinica, 2012, 32(4): 0422004.

[5] 林招荣. 典型R-C 系统主光学装置的热光学分析[J]. 航天器返回与遥感, 2006, 27(2): 23-27.

    Lin Zhaorong. Thermal-optical analysis of a typical R-C imaging system′ s primary optical equipment [J]. Spacecraft Recovery & Remote Sensing, 2006, 27(2): 23-27.

[6] 王平, 张国玉, 王伟, 等. 航空变焦距镜头被动消热设计[J]. 光学学报, 2012, 32(9): 0922006.

    Wang Ping, Zhang Guoyu, Wang Wei, et al.. Passive athermal design of aerial zoom lenses [J]. Acta Optica Sinica, 2012, 32(9): 0922006.

[7] 陈长征, 赵贵军, 张星祥, 等. 空间光学镜头可适应边界温度的CAE 计算方法[J]. 光学 精密工程, 2007, 15(5): 668-673.

    Chen Changzheng, Zhao Guijun, Zhang Xingxiang, et al.. A calculating method for temperature tolerance of space telescope [J]. Optics and Precision Engineering, 2007, 15(5): 668-673.

[8] 贾勇, 高云国, 邵帅. 热载荷下激光扩束系统的光机优化设计[J]. 中国激光, 2014, 41(1): 0116003.

    Jia Yong, Gao Yunguo, Shao Shuai. Opto-mechanical optimization for laser expander system under thermal loads [J]. Chinese J Lasers, 2014, 41(1): 0116003.

[9] 杨添星, 黄玮, 尚红波, 等. 材料折射率非均匀性对极小像差光学系统像质的影响[J]. 激光与光电子学进展, 2013, 50(11): 112202.

    Yang Tianxing, Huang Wei, Shang Hongbo, et al.. Effect of material inhomogeneity on the image quality of optical systems with extremely small aberration [J]. Laser & Optoelectronics Progress, 2013, 50(11): 112202.

[10] 方煜, 相里斌, 吕群波, 等. 光学窗口厚度设计及形变对相机性能影响[J]. 光学学报, 2013, 33(4): 0422007.

    Fang Yu, Xiang Libin, Lü Qunbo, et al.. Design of optical window thickness and influence of its deformation on multispectral camera′s optical performance [J]. Acta Optica Sinica, 2013, 33(4): 0422007.

[11] Chen Hua, Yang Huaijiang, Yu Xinfeng, et al.. Simulated and experimental study of laser-beam-induced thermal aberrations in precision optical systems [J]. Appl Opt, 2013, 52(18): 4370-4376.

[12] 李其锴. Zernike 多项式拟合用于低温光学镜头热集成分析[J]. 航天返回与遥感, 2010, 31(4): 45-50.

    Li Qikai. Zernike polynomials fitting in cryogenic optical thermal integration analysis [J]. Spacecraft Recovery & Remote Sensing, 2010, 31(4): 45-50.

[13] 刘家国, 李林. 光机热集成分析中数据转换接口研究[J]. 北京理工大学学报, 2007, 27(5): 427-431.

    Liu Jiaguo, Li Lin. Study on the data transfer interface in the thermal/structural/optical integrated analysis [J]. Transactions of Beijing Institute of Technology, 2007, 27(5): 427-431.

[14] Max Born, Emil Wolf. Principles of Optics [M]. London: Pergamon Press Ltd, 1970. 523-532.

周连生, 于新峰, 吴志会, 芮大为, 张巍. 基于小物镜系统的热像差影响因素分析[J]. 激光与光电子学进展, 2014, 51(9): 092204. Zhou Liansheng, Yu Xinfeng, Wu Zhihui, Rui Dawei, Zhang Wei. Analysis of Influence Factors of Thermal Aberrations Based on the Small Lens System[J]. Laser & Optoelectronics Progress, 2014, 51(9): 092204.

本文已被 4 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!