激光与光电子学进展, 2009, 46 (12): 38, 网络出版: 2009-12-17  

等离子体MEMS 红外光源研究进展

Research Developments in Plasmonic MEMS Infrared Light Source
作者单位
1 复旦大学 微电子学系ASIC 与系统国家重点实验室,上海200433
2 桂林电子科技大学 信息与通信学院,广西桂林蓸541004
摘要
利用金属/电介质光子晶体(MDPC)对黑体热辐射光谱有增强透射和滤波的剪裁特性,制成能够发射出高性能、可调谐窄带相干光的等离子体微机电系统(MEMS)红外光源。其工作波长可选择性、工艺简单、成本低和MEMS 化等优点使其在生物、医学和**等领域得到广泛的应用。对该器件的结构与材料选择、工作机理、工艺流程及性能表征和研究进展进行了详细的综述,对其在微型非色散红外(NDIR)气体传感系统中的应用前景进行了展望。
Abstract
The plasmonic microelectromechanical systems (MEMS) infrared light sources,which can emit high performance,tunable narrowband,and coherent light are fabricated by using tailor-made properties of metal/dielectric photonic crystals (MDPC) which can enhance the blackbody radiation spectrum transmission and filtering. The advantages of infrared light source like alternative work wavelength,simple process,low-cost and MEMS systematization bring it a wide application in biological,medical and military fields. The structure,material selection,working mechanism,technologic process,performance characterization and research progress of the device are summarized in detail,and the application prospect for miniature non-dispersive infrared (NDIR) gas sensing system is viewed.
参考文献

[1] G. Scamarcio,F. Capasso,C. Sirtori et al.. High-power infrared superlattice lasers [J]. Science,1997,276 (5313):773-776

[2] . H. Mastrangelo,J. H. Yeh,R. S. Muller. Electrical and optical characteristics of vacuum-sealed polysilicon microlamps[J]. IEEE Trans. Electron Dev., 1992, 39(6): 1363-1375.

[3] . Corman,E. K覿lvesten,G. Stemme et al.. An optical IR-source and CO2-chamber system for CO2 measurements[J]. IEEE ASME J. Microelectromech. Syst., 2000, 9(4): 509-516.

[4] . Najafi,K. D. Wise,and J. W. Schwank. A Micromachined Ultra-Thin-Film Gas Detector[J]. IEEE Trans. Electron Dev., 1994, 41(10): 1770-1777.

[5] . Bauer,M. Heeger,M. Gebhard et al.. Design and fabrication of a thermal infrared emitter[J]. Sensor. Actuator. Phys., 1996, 55: 57-63.

[6] . Greffet,K. Joulain,Y. Chen et al.. Coherent emission of light by thermal sources[J]. Nature, 2002, 416(6876): 61-64.

[7] . J. Hesketh,J. N. Zemel,B. Gebhart et al.. Organ pipe radiant modes of periodic micromachined silicon surfaces[J]. Nature, 1986, 324(6097): 549-551.

[8] B. J. Lee,C. J. Fu,Z. M. Zhang et al.. Coherent thermal emission from one-dimensional photonic crystals [J]. Appl. Phys. Lett.,2005,87(7):071904

[9] . G. Fleming,S. Y. Lin,K. M. Ho et al.. All -metallic three -dimensional photonic crystals with a large infrared bandgap[J]. Nature, 2002, 417(6884): 52-55.

[10] . Y. Lin,J. Moreno,and J. G. Fleming. Three-dimensional photonic-crystal emitter for thermal photovoltaic power generation[J]. Appl. Phys. Lett., 2003, 83(2): 380-382.

[11] . Y. Lin,J. G. Fleming,Jim Bur et al.. A three-dimensional photonic crystal operating at infrared wavelengths[J]. Nature, 1998, 394(6690): 251-253.

[12] . U. Pralle,N. Moelders,M. P. McNeal et al.. Photonic crystal enhanced narrow-band infrared emitters[J]. Appl. Phys. Lett., 2002, 81(25): 4685-4687.

[13] P. Theodoni,V. Em. Vamvakas,N. Papanikolaou et al.. Efficient infrared emission from patterned thin metal films on a Si photonic crystal[J]. Microelectron. Engineer.,2008,85(5-6):1112-1115

[14] T. Thio,H. F. Lezec,P. A. Wolff et al.. Surface-plasmon-enhanced transmission through hole arrays in Cr films[J]. J. Opt. Am. B,. 1999,16(10):1743-1748

[15] . Biswas,C. G. Ding,E. Johnson et al.. Theory of subwavelength hole arrays coupled with photonic crystals for extraordinary thermal emission[J]. Phys. Rev. B, 2006, 74: 045107.

[16] G. L. Xiao,X. Yao,Y. P. Huang et al.. Effect of the ratio of hole radius to lattice spacing on transmissioncharacteristics for metal/dielectric photonic crystal [C]. 2008 9th International Conference on Solid -State and Integrated Circuit Technology ,2008:1025-1028

[17] A. Krishnan,T. Thio,T. J. Kima et al.. Evanescently coupled resonance in surface plasmon enhanced transmission [J]. Opt. Commun.,2001,200(1-6):1-7

[18] . G. Rodrigo,F. J. Garcia -Vidal,L. Martin -Moreno. Influence of material properties on extraordinary optical transmission through hole arrays[J]. Phys. Rev. B, 2008, 77(07): 075401.

[19] . Puscasu,M. U. Prallea,M. P. McNeal et al.. Frequency selective surfaces enable MEMS gas sensor[J]. Mat. Res. Soc. Symp. Proc., 2002, 722: L3.

[20] . W. Ebbesen,H. J. Lezec,H. F. Ghaemi et al.. Extraordinary optical transmission through sub-wavelength hole arrays[J]. Nature, 1998, 391(6668): 667-669.

[21] H. Raether. Surface plasmons on smooth and rough surfaces and on gratings[M]. Springer-Verlag,Berlin,New York,1988. 7-30

[22] W. L Barnes. Surface plasmon-polariton length scales:a route to sub-wavelength optics[J]. Opt. A:Pure Appl. Opt. 2006,8:S87-S93

[23] R. Gordon,A. G. Brolo. A. McKinnon et al.. Strong polarization in the optical transmission through elliptical nanohole arrays[J]. Phys. Rev. Lett.,2004,92(3):037401-037404

[24] . Puscasu,M. Pralle,E. Johnson et al.. Extraordinary emission from two-dimensional plasmonic-photonic crystals.[J]. J. Appl. Phys., 2005, 98(01): 013531.

[25] . J. Burke,G. I. Stegeman,T. Tamir. Surface-polariton-like waves guided by thin,lossy metal films[J]. Phys. Rev. B, 1986, 33(8): 5186-5201.

[26] . F. Ghaemi,T. Thio,D. E. Grupp et al.. Surface plasmons enhance optical transmission through subwavelength holes[J]. Phys. Rev. B, 1998, 58(11): 6779-6782.

[27] I. Puscasu,M. Pralle,A. A. Shah et al.. Photolithographically controlled emission from photonic crystals [C]. SPIE,2005,6008:185-193

[28] R. Biswas,D. Zhou,W. Zhao et al.. Sharp thermal emission and absorption from conformally coated metallic photonic crystal with triangular lattice[J]. Appl. Phys. Lett.,2008,93(06):063307

[29] . Diwekar,T. Matsui,Z. V. Vardeny et al.. Midinfrared optical response and thermal emission from plasmonic lattices on Al films[J]. Phys. Rev. B, 2007, 76(19): 195402.

[30] . M. Wang,Y. C. Chang,D. P. Tsai et al.. Reflection and emission properties of an infrared emitter[J]. Opt. Exp., 2007, 15(22): 14673-14678.

[31] C. Y. Chen,M. W. Tsai,S. C. Lee et al.. Coupling of surface plasmons between two silver films in a plasmonic thermal emitter[J]. Appl. Phys. Lett.,2007,91(24):243111

[32] . W. Tsai,C. Y. Chen,Y. W. Jiang et al.. Coupling between surface plasmons via thermal emission of a dielectric layer sandwiched between two metal periodic layers[J]. Appl. Phys. Lett., 2007, 91(21): 213104.

[33] . Puscasu and W. L. Schaich. Narrow-band,tunable infrared emission from arrays of microstrip patches[J]. Appl. Phys. Lett., 2008, 92(23): 233102.

[34] . J. Lezec,A. Degiron,E. Devaux et al.. Beaming light from a subwavelength aperture[J]. Science, 2002, 297(5582): 820-822.

肖功利, 姚翔, 纪新明, 周嘉, 包宗明, 黄宜平. 等离子体MEMS 红外光源研究进展[J]. 激光与光电子学进展, 2009, 46(12): 38. Xiao Gongli, Yao Xiang, Ji Xinming, Zhou Jia, Bao Zongming, Huang Yiping. Research Developments in Plasmonic MEMS Infrared Light Source[J]. Laser & Optoelectronics Progress, 2009, 46(12): 38.

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