磁控溅射硅基薄膜应力演化实时研究
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李静平, 方明, 贺洪波, 邵建达, 李朝阳. 磁控溅射硅基薄膜应力演化实时研究[J]. 强激光与粒子束, 2013, 25(11): 2826. Li Jingping, Fang Ming, He Hongbo, Shao Jianda, Li Zhaoyang. In situ stress evolution in magnetron-sputtered Si-based thin films[J]. High Power Laser and Particle Beams, 2013, 25(11): 2826.
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