超精表面缺陷检测的光学混频误差分析

林浩山; 陈举科; 李玉和; 李庆祥; 潘福东; 王力虎

doi:doi:10.3788/lop52.021203

激光与光电子学进展, 2015, 52 (2): 021203, 网络出版: 2015-01-19

超精表面缺陷检测的光学混频误差分析下载： 616次

Error Analysis of Optical Frequency Mixing on Detecting Device for Superfinish Surface Scratch

论文大纲

林浩山 ^1,*陈举科 ¹李玉和 ²李庆祥 ²潘福东 ¹王力虎 ¹

作者单位

¹ 广西师范大学物理科学与技术学院, 广西桂林 541004

² 清华大学精密测试技术及仪器国家重点实验室, 北京 100084

测量外差干涉偏振光琼斯矩阵频率混叠非线性误差 measurement heterodyne interferometry polarized light Jones matrix frequency mixing nonlinear errors

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摘要

双频激光外差干涉法与扫描探针相结合的超精表面缺陷检测系统具有很高的分辨率。但系统光源和光学器件的各种误差因素会产生非线性混频误差，影响系统精确测量。利用琼斯矩阵分析了同时存在激光光源椭圆偏振化和方位角误差以及光学器件相位延迟和偏振泄漏等综合因素引起的偏振态变化，并由此研究了它们频率混叠产生的非线性误差。结果表明，由各种误差因素引起的非线性混频误差呈正弦规律变化，激光光源非理想和偏振分光镜对位移测量误差影响较大而1/4 波片的影响较小。同时，结合计算结果对系统提出了减少非线性误差的方法措施。

Abstract

A novel method with high resolution has been proposed which is based on heterodyne interferometry and scanning probe to get the measurement values of superfinish surface scratch. But the optical nonlinear errors affect the measurement precision of the system. We adopt the Jones matrix to analyze the change of elliptic polarization caused by the composite error factors, which are polarization ellipticity and installation orientation error of laser source, phase retardation of quarter-wave plate and polarization leakage of polarization beam splitter. The measurement errors of frequency mixing about these elliptic polarization beams arriving at the photodiode detector are studied by vector theory. The results show that the measurement errors are periodic errors, and they are more affected by nonideal laser and polarization beam splitter. Also, the methods of reducing nonlinear error according to the numerical results in the system are suggested.

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林浩山, 陈举科, 李玉和, 李庆祥, 潘福东, 王力虎. 超精表面缺陷检测的光学混频误差分析[J]. 激光与光电子学进展, 2015, 52(2): 021203. Lin Haoshan, Chen Juke, Li Yuhe, Li Qingxiang, Pan Fudong, Wang Lihu. Error Analysis of Optical Frequency Mixing on Detecting Device for Superfinish Surface Scratch[J]. Laser & Optoelectronics Progress, 2015, 52(2): 021203.

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