用于投影光刻机光瞳整形的衍射光学元件设计
胡中华, 宝喜, 朱菁, 肖艳芬, 曾爱军, 黄惠杰. 用于投影光刻机光瞳整形的衍射光学元件设计[J]. 中国激光, 2013, 40(6): 0616001.
Hu Zhonghua, Yang Baoxi, Zhu Jing, Xiao Yanfen, Zeng Aijun, Huang Huijie. Design of Diffractive Optical Element for Pupil Shaping Optics in Projection Lithography System[J]. Chinese Journal of Lasers, 2013, 40(6): 0616001.
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胡中华, 宝喜, 朱菁, 肖艳芬, 曾爱军, 黄惠杰. 用于投影光刻机光瞳整形的衍射光学元件设计[J]. 中国激光, 2013, 40(6): 0616001. Hu Zhonghua, Yang Baoxi, Zhu Jing, Xiao Yanfen, Zeng Aijun, Huang Huijie. Design of Diffractive Optical Element for Pupil Shaping Optics in Projection Lithography System[J]. Chinese Journal of Lasers, 2013, 40(6): 0616001.