基于硅悬臂高阶谐振的动态原子力显微镜的快速扫描
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黄强先, 尤焕杰, 袁丹, 赵阳, 胡小娟. 基于硅悬臂高阶谐振的动态原子力显微镜的快速扫描[J]. 光学 精密工程, 2014, 22(3): 656. HUANG Qiang-xian, YOU Huan-jie, YUAN Dan, ZHAO Yang, HU Xiao-juan. High speed scanning for dynamic atomic force microscope based on higher-order resonance of silicon cantilever[J]. Optics and Precision Engineering, 2014, 22(3): 656.