红外与毫米波学报, 2017, 36 (6): 756, 网络出版: 2018-01-04
基于反射差分显微术的有机薄膜空间均一性研究
Spatial uniformity of organic thin films based on reflectance difference microscopy
反射差分显微术 各向异性 薄膜质量 偏振光学 reflectance difference microscopy anisotropy film quality polarization optics
摘要
有机薄膜半导体器件在微电子和光电子领域具有重要的研究与应用价值, 其成膜质量是影响器件性能的重要因素, 如空间分布的均一性.采用反射差分显微测量方法, 对各向异性基底上生长的并五苯薄膜的反射差分显微图像进行分析, 研究了该薄膜参数空间分布的非均一性, 同时展示了反射差分显微术在薄膜制备检测及工艺研究的应用价值.
Abstract
Organic thin-film semiconductor devices have important applications in the fields of microelectronics and optoelectronics. The film quality is one of the key factors affecting the device performance such as the uniformity of film spatial distribution. This parameter was studied by analyzing the reflectance difference maps of pentacene thin film grown on an anisotropic substrate which were measured by reflectance difference microscopy.
霍树春, 胡春光, 沈万福, 李艳宁, 胡小唐. 基于反射差分显微术的有机薄膜空间均一性研究[J]. 红外与毫米波学报, 2017, 36(6): 756. HUO Shu-Chun, HU Chun-Guang, SHEN Wan-Fu, LI Yan-Ning, HU Xiao-Tang. Spatial uniformity of organic thin films based on reflectance difference microscopy[J]. Journal of Infrared and Millimeter Waves, 2017, 36(6): 756.