基于石墨烯的光纤功能化传感器件和激光器件 
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1 引言
石墨烯(Graphene)作为一种由单层碳原子组成六角型呈蜂巢晶格的二维碳纳米材料[1-2],自2004年诞生以来,就成为纳米技术研究的热门话题,受到物理学家、化学家、材料科学家和工程师的密切关注[1,3-5],逐步从化学物理学、材料科学[6-7]领域拓展到光电子学、力学和热学[8-11]领域。特别是在光电子学中,因其准粒子狄拉克费米子遵循线性色散和手征对称性[12-13],故石墨烯的光学传导率仅由精细结构常数[14]决定。此外,石墨烯具有独特的零带隙,其电荷载流子浓度可以通过施加的电场来控制[1],该特性使石墨烯具有显著的载流子密度可调性和相应的表面灵敏度[15-17]。基于石墨烯独特且优异的光电子学特性,研究者们探索了一系列基于石墨烯的先进光电子和光子器件,如调制器[18-20]、光电探测器[21]、可控等离激元[17,22-23]、超快激光器、光学非线性器件和传感器[24-31],在光电子应用,特别是微纳/集成光电子应用中展现出广阔的应用前景[7,10,24]。本文阐述了石墨烯光纤复合结构的制备技术,重点介绍了基于石墨烯功能化的传感器、激光器和非线性控制器件。
2 基于石墨烯的光纤复合结构及其制备技术
2.1 承载石墨烯的光纤元件平台
石墨烯以其独特柔性特点,能够非常方便地和光纤结构进行组装[32],通过倏逝波耦合,实现光纤复合结构的功能化。目前,常用的光纤平台包括微纳光纤和D形光纤。微纳光纤的制备通常采用熔融拉锥法[33]和化学蚀刻法[34-35]。采用熔融拉锥法制备微光纤从模式上类似于从预制棒中拉出光纤的过程,其光学损失主要取决于微光纤质量,稳定的拉锥过程能保证制成的微光纤具有圆形的横截面、均匀的直径分布、光滑的外表面和高度的一致性[36]。加热器可以是火焰(通常是氢氧焰)、电加热器或激光加热管。
图 1. 光纤元件制造。(a)熔融拉锥法微纳光纤拉制设备;(b)二氧化硅微光纤;(c)微光纤红光表征;(d) D形光纤抛磨设备;(e) SMF-D形光纤;(f) SMF-D形光纤红光表征[33,38]
Fig. 1. Fabrication of fiber components. (a) Micro-nanofiber drawing equipment based on fused tapering method; (b) silica microfiber; (c) microfiber red light characterization; (d) D-shaped fiber polishing equipment;(e) SMF-D-shaped fiber; (f) red light characterization of SMF-D-shaped fiber[33,38]
2.2 功能化的石墨烯材料
根据应用需求,可将用于光纤器件功能化的石墨烯材料分为多种类型,主要包括本征石墨烯(Graphene)、氧化石墨烯(GO)、部分还原氧化石墨烯(prGO)以及元素掺杂石墨烯。
石墨烯的制备方法主要包括机械剥离法[39]、化学剥离法[40-41]、还原氧化石墨烯[42-43]、碳化硅上的外延生长[44-45]、化学气相沉积(CVD)[46-48]和化学合成[49-50]。化学气相沉积(CVD)方法已成为大规模生产单层和多层石墨烯薄膜最有前景的技术之一。该技术制备的石墨烯在英寸尺度范围内具有良好的尺度均匀性,通过湿法转移技术已广泛应用于光电子器件中。氧化石墨烯是石墨烯的氧化物,通常由Brodie方法[51]、Staudenmaier方法[52]、Hummers方法[53]或这些方法的一些变体方法合成[54-56]。部分还原氧化石墨烯的制备首先沉积氧化石墨烯薄膜,再通过维生素C等还原剂还原以除去氧化石墨烯的部分氧基团。与CVD石墨烯薄膜相比,prGO薄膜通常具有更多缺陷,但GO薄膜的沉积不需要额外的转移过程,相比于其他方法更容易实现。石墨烯基材料可以通过掺杂进行有效的改性,从而使其性能适用于特定的场景。通常通过原位[57]和非原位[58]掺杂方法向碳晶格网络中注入杂质原子,最常用和被广泛研究的掺杂原子是氮、氧、硼、磷和硫。
石墨烯因其具有非常良好的光学特性、稳定的晶体结构、强极性分子吸附能力、高载流子迁移率、电可调的电导率和宽谱光可饱和吸收特性,被广泛应用于化学气体生化传感[59-62]、超快激光器[63-64]和电可调谐光电子器件[65-68]。氧化石墨烯是石墨烯的氧化物形式,在其基面上存在许多含氧官能团,如环氧化物、羟基、羰基和羧基。这些含氧官能团使得石墨烯很容易与含氨基、羧基、异氰酸酯基等极性聚合物基质发生反应,在蛋白质、核酸、葡萄糖等生物分子的检测上有明显的性能优势,但是,这些含氧官能团降低了导电性,限制了其在光电子器件的应用。部分还原的氧化石墨烯同时具有氧化石墨烯和本征石墨烯的性质,在存在含氧官能团的同时具备石墨烯的优良光学特性,并且相比于石墨烯更容易制备,在部分场合可以替代石墨烯作为传感和光电子材料。石墨烯中掺杂原子后可以转变为p型或n型半导体,并可开放石墨烯的带隙,在半导体光电子器件领域有着广泛的应用,同时通过特定掺杂可以使石墨烯拥有对气体的高选择性,实现功能特异性的高灵敏气体传感[69]。
2.3 复合波导构成
基于光学结构设计和材料特点,有代表性的光纤/石墨烯复合波导包括:微光纤贴附石墨烯型、石墨烯包裹微光纤型、基于石墨烯的D形光纤复合波导和光纤端面贴附石墨烯型。复合波导的制备步骤如下:1) 将聚甲基苯烯酸甲酯(PMMA)旋涂在石墨烯/铜复合层的上表面,并固化PMMA;2) 将PMMA/石墨烯/铜复合层放置在FeCl3溶液中,通过置换反应溶解掉铜层,去除了铜层的PMMA/石墨烯复合薄膜会漂浮在溶液表面;3) 将PMMA/石墨烯柔性薄膜用去离子水(DIW)浸泡和清洗;4) 通过包裹微光纤、贴附氟化镁基底、覆盖片上波导结构和光纤端面蘸取等方式将PMMA/石墨烯复合薄膜与波导结合;5) 将PMMA/石墨烯/波导复合结构烘干定型;6) 将定型的PMMA/石墨烯/波导复合结构置于丙酮或丙酮蒸汽中,去除PMMA层[59,70-74]。该方法同样适用于氧化石墨烯以及其他二维材料。各种复合波导的具体制备工艺如
图 2. 复合波导制备工艺。(a)微光纤贴附石墨烯;(b)石墨烯包裹微光纤;(c)基于石墨烯的D形光纤复合波导;(d)光纤端面贴附石墨烯[59,70-74]
Fig. 2. Composite waveguide fabrication process. (a) Micro-fiber attached graphene; (b) graphene-coated micro-fiber; (c) graphene-based D-shaped fiber composite waveguide; (d) fiber end-face attached graphene[59,70-74]
3 基于石墨烯的功能化光纤传感器
目前,石墨烯已经应用于各种光纤传感器,并且这些传感器中的大多数是利用石墨烯与光纤倏逝波的相互作用进行传感。石墨烯结合光纤传感技术是一种新的传感方式,近年来,研究人员基于该传感方式提出了各种传感器结构用于实现对物理量、气体和生化的传感。
3.1 物理量传感
当环境温度发生微小变化时,石墨烯的导热系数会发生相应的变化。由于良好的热光效应,石墨烯的折射率会发生明显的快速变化,能实现基于光纤的温度传感。石墨烯的折射率与温度的关系式为[75]
式中:
基于该效应,2014年,Zhang等[76]通过比较同一可调温度室内的去除涂层的标准单模光纤(SMF)、D形光纤和涂有还原氧化石墨烯(rGO)薄膜的D形光纤三种温度探头,验证了rGO的温度敏感性。
图 3. 光纤温度传感器。(a) D形光纤温度传感器结构;(b)镀rGO膜D形光纤中光传输功率随温度的变化;(c) FP腔温度传感器结构;(d) FP腔谐振波长随温度的变化[75-76]
Fig. 3. Fiber temperature sensors. (a) D-shaped fiber temperature sensor structure; (b) optical transmission power in D-shaped fiber coated with rGO film as a function of temperature; (c) FP cavity temperature sensor structure; (d) FP cavity resonance wavelength as a function of temperature[75-76]
光纤电流传感器由于抗电磁干扰而被广泛使用[78]。实现光纤电流传感器的一个重要方法是使用磁光效应,但因为光纤Verdet常数相对较低[79],所以基于磁效应的传感器通常尺寸较大;另一种方法是使用热效应,例如更容易实现的热膨胀效应或热光效应。南京大学徐飞教授课题组在基于石墨烯的光纤电流传感器方面进行了较为系统的研究。基于石墨烯优良的热膨胀效应和热光效应,设计了两种传感结构,即在光纤端面悬浮石墨烯薄膜和由微光纤石墨烯集成谐振器[80-83]。2015年,徐飞教授课题组Zheng等[80]报道了一种基于悬浮石墨烯膜的高灵敏度光纤电流传感器。悬浮石墨烯膜是基于热效应的光纤电流传感器的理想传感元件,结构如
图 4. 基于石墨烯的光纤电流传感器。(a)普通光纤端面悬浮石墨烯薄膜传感结构及其传感电流响应曲线;(b)刻蚀光纤端面悬浮石墨烯传感结构及其传感电流响应曲线;(c)微光纤线圈谐振器传感结构及其传感电流响应曲线[80-83]
Fig. 4. Graphene-based fiber current sensors. (a) Sensor structure and sensing current response curve of suspension graphene film on end face of single mode fiber; (b) sensor structure and sensing current response curve of suspension graphene film on end face of etched fiber; (c) sensor structure and sensing current response curve of micro-fiber coil resonator[80-83]
除了高效灵敏的温度和电流传感,基于石墨烯的光纤物理量传感器还能够实现更多的应用。2015年,Tan等[84]将石墨烯覆盖在光子晶体光纤(PCFs)上,实现了对外界环境折射率的连续变化检测,
基于石墨烯的压力传感器基本都采用了光纤末端FP腔的装置,利用石墨烯对外部压力敏感的特性,改变法珀腔的腔长,从而测得外部压力变化。2012年,Ma等[89]利用硅胶毛细管作为FP腔的腔体,一端溶解单模光纤,另一端覆盖石墨烯。该装置在外界压强为0~5 kPa时,灵敏度达到了34.6 nm/kPa。2018年,Dong等[90]通过增加石墨烯的直径和厚度,使传感装置在外界压强为0~2 kPa时,灵敏度提升到了501.4 nm/kPa,
3.2 化学气体传感
石墨烯具有较大的表面积率,单层石墨烯的每个碳原子都可视为表面原子。石墨烯对多种分子具有吸附能力,如氨气、氧气、氢气、一氧化碳、重金属离子、有机染料、芳香族污染物和蛋白质等,故可实现高性能气体浓度传感器[92-95]。通过逐步优化传感结构和机理,这些基于石墨烯的光纤气体传感器的灵敏度从千分之一(10-3)水平逐渐提高到十亿分之一(10-9)水平。
基于石墨烯的光纤气体传感器的主要传感机理为:石墨烯吸附气体分子,改变了石墨烯的电导率,进而对石墨烯折射率产生调制作用;当光纤中的光以倏逝场的形式与石墨烯相互作用时,其对折射率的调制作用转变为对光的调制作用;在接收端解调获取传感信息。
2012年,电子科技大学率先报道了基于光强检测和干涉解调的气体传感器[59-62]。
相比于石墨烯贴附光纤,自2014年以来,石墨烯包裹微纤维的结构拥有更高的光电子相互作用效率。例如,基于石墨烯包裹的微光纤布拉格光栅(MFBG)的方案可以显著地减小传感器的体积。2014年,Wu等[97]报道了基于MFBG的超灵敏NH3气体传感器。
图 5. 基于石墨烯的物理量传感器。(a)基于石墨烯的光纤折射率传感器;(b)基于石墨烯的光纤磁场传感器;(c)基于石墨烯的光纤压力传感器[84,88,90]
Fig. 5. Graphene-based physical quantity sensors. (a) Graphene-based fiber refractive index sensor; (b) graphene-based fiber magnetic field sensor; (c) graphene-based fiber pressure sensor[84,88,90]
在基于石墨烯的微光纤结构中,增强光与石墨烯相互作用的另一种方法是激发具有较大模场面积的高阶模式传播或激发等离子体。2014年,Yao等[71]报道了一种基于石墨烯的微纤维多模干涉仪传感结构,如
图 6. 基于石墨烯的微光纤气体传感器。(a)光强检测型气体传感器用于丙酮气体传感;(b)干涉解调型气体传感器用于氨气传感;(c)石墨烯包裹微光纤氨气传感器;(d) GO包裹微光纤布拉格光栅NO2传感器[59,62,97-98]
Fig. 6. Graphene-based microfiber gas sensors. (a) Light intensity detection type gas sensor used for acetone gas sensing; (b) interference demodulation type gas sensor used for ammonia gas sensing; (c) graphene coated microfiber ammonia sensor; (d) GO coated microfiber Bragg grating NO2 sensor[59,62,97-98]
受光学干涉的光谱分辨率和无源器件的线性损耗限制,基于石墨烯的光纤气体传感器的分辨率限制在百万分之一量级,很难进一步提高分辨率。利用高品质因子的谐振腔可以有效地改善干涉光谱分辨率。2016年,Yu等[102]通过构建GO沉积的微光纤结谐振器实现了气体传感,其结构图如
图 7. 复合结构气体传感器。(a)多模干涉传感器;(b)SPR气体传感器;(c)光纤结谐振传感器;(d)布里渊回音壁谐振腔气体传感器[19,101-103]
Fig. 7. Gas sensors with composite structures. (a) Multimode interference sensor; (b) SPR gas sensor; (c) fiber knot resonant sensor; (d) gas sensor with Brillouin whispering gallery mode cavity[19,101-103]
3.3 生化传感
除了气体传感,基于石墨烯的功能化光纤复合波导还能工作在液相环境,实现多样化的生化传感器件。由于石墨烯能够吸附各种分子,如重金属离子、有机分子和气体分子等。2015年,Girei等[106]将锥形光纤与石墨烯结合测量了水中乙醇溶液的体积分数,如
基于石墨烯的分子吸附特性,研究者们近年来提出许多光纤传感结构。2015年,Yao等[107]通过在D形微结构光子晶体光纤布拉格光栅(FBG)上覆盖石墨烯,提出并展示了一种新型血红细胞传感器。倏逝场从侧抛面透出,经石墨烯后得到显著增强。因此,该传感器的灵敏度得到进一步提高,其传感结构如
除基于石墨烯分子吸附特性实现的光纤生化传感器外,基于石墨烯等离激元特性(SPR)的光纤生化传感器同样是生化传感领域的研究热点。为了提高传统光纤SPR生化传感器的灵敏度,研究者们引入石墨烯以增强对生物分子的吸附。理论研究表明,通过结合石墨烯传感层,所提出的SPR光纤生物传感器的灵敏度相比传统的SPR光纤传感器有很大提高[111-112]。利用石墨烯的表面等离子体特性,结合传统的SPR传感器结构,如光纤SPR[111,113]、光子晶体光纤SPR[112,114]可以实现各种生化传感器的设计。2015年,Fu等[111]提出金上石墨烯包裹光纤纤芯的生化传感结构,并探究了石墨烯层数对传感灵敏度的影响结构,如
图 8. 基于石墨烯的光纤生化传感器。(a)微纳光纤乙醇传感器; (b) D形光纤血红细胞传感器; (c)空心光纤湿度传感器; (d)石墨烯包裹光纤纤芯的SPR传感结构示意图; (e)金上石墨烯贴附D形光纤的SPR传感结构示意图; (f)银-石墨烯包裹光子晶体光纤的SPR传感结构示意图[106-107,110-111,115,118]
Fig. 8. Graphene-based fiber biochemical sensors. (a) Micro-nanofiber ethanol sensor; (b) D-shaped fiber red blood cell sensor; (c) hollow fiber humidity sensor; (d) diagram of SPR sensing structure of graphene-encapsulated fiber core; (e) diagram of SPR sensing structure of graphene-on-gold attached D-shaped fiber; (f) diagram of SPR sensing structure of silver-graphene encapsulated photonic crystal fiber[106-107,110-111,115,118]
4 基于石墨烯的功能化光纤激光器和非线性器件
快速光纤激光器具有短脉冲宽度和高峰值功率,在超精密制造、医疗诊断、医疗、精密测量、天文检测以及材料加工等方面具有重要应用。调
4.1 光纤锁模激光器
2009—2010年,新加坡国立大学和剑桥大学先后实现了石墨烯的超快锁模激光器[63-64]。同年,Popa等[122-123]报道了一种由石墨烯作为可饱和吸收体(GSA)的锁模光纤激光器,通过匹配腔体内掺铒(EDF)光纤提供的正色散和单模光纤(SMF)提供的负色散,得到光谱宽度为15.6 nm、脉冲宽度约为174 fs的超短脉冲输出。从此,对基于石墨烯的锁模激光器特别是光纤锁模激光器研究成为热点,先后制备出各种各样的锁模激光器,输出脉冲突破百飞秒级,重复频率一般在兆赫兹级,并已发展到多个波段[124-126]。
2014年,Fu等[127]采用石墨烯作为可饱和吸收体,通过光纤端面贴敷石墨烯的方式并通过实验证明了三种主要光纤激光器(即YDFL、EDFL和THDFL,中心波长分别为1035,1564,1908 nm)的被动锁模激光输出,其器件结构、频谱和脉冲如
图 9. 光纤锁模激光器。(a)端面贴附型光纤锁模激光器;(b)D形光纤锁模激光器;(c)微纳光纤锁模激光器;(d)石墨烯电光调制器主动锁模激光器[65,127,130,132]
Fig. 9. Fiber mode locked lasers. (a) End-face attached fiber mode locked lasers; (b) D-shaped fiber mode locked lasers; (c) micro-nanofiber mode locked lasers; (d) active mode locked lasers based on graphene electro-optic modulators[65,127,130,132]
主动锁模激光器具有电可控脉冲重复率的能力,相比于被动锁模激光器拥有更好的灵活性。基于石墨烯的电光调制器具有带宽可操作和超快速度的独特优点,适用于各种光电应用中的光调制。2018年,Bogusławski等[65]首次报道了具有基于石墨烯的电光调制器的主动锁模激光器,器件结构如
4.2 光纤调Q激光器
除了锁模激光,石墨烯还可以被用来产生调
2014年,Tang等[135]报道了高功率TDFL被动调
2017年,Li等[140]首次报道了基于石墨烯电光调制器(GEOM)的主动调
图 10. 光纤调Q激光器。(a) TDFL被动调Q激光器;(b)分布反馈布拉格光栅光纤调Q激光器;(c) EDFL主动调Q光纤激光器[135,139-140]
Fig. 10. Fiber Q-switched lasers. (a) TDFL passive Q-switched laser; (b) Q-switched laser based on distributed feedback Bragg grating fiber; (c) EDFL active Q-switched fiber laser[135,139-140]
4.3 光纤非线性器件
石墨烯的原子厚度、无间隙狄拉克费米能带结构和超短的载流子弛豫时间使其成为光子集成器件应用最有希望的材料。重要的是,可主动调谐的石墨烯-波导集成的光电器件可以用于实现可调光电子器件,拓宽器件的应用范围,提高器件的灵活性。2014年,浙江大学童利民教授课题组Li等[32]提出了基于石墨烯包覆的微纤维全光调制器,如
图 11. 基于石墨烯的非线性器件。 (a)基于石墨烯的全光调制器;(b)电加热方法调控石墨烯的费米-狄拉克分布;(c) DFG等离激元激发;(d)栅极可调谐光频梳[32,66-68]
Fig. 11. Graphene-based nonlinear optical devices. (a) Graphene-based all-optical modulator; (b) electrical heating method to regulate Fermi-Dirac distribution of graphene; (c) DFG plasmon excitation; (d) gate tunable optical frequency comb[32,66-68]
5 结 束 语
回顾了基于石墨烯的光纤功能化激光器和传感器件的制备、测试和性能。基于石墨烯的光纤传感器近年来成为传感领域研究的热点,并已经在实际的应用中发挥了重要作用。由于能够高精度、高灵敏地实现物理量、气体和生物传感,石墨烯与光纤的结合是功能化光电子器件的研究趋势之一。在未来,通过更进一步研究高阶非线性特性[103],中红外范围到太赫兹区域的等离子体传感[16],声子激光[146]和奇异点(EP)增强[147]以及光纤直接融入石墨烯[148]等新原理、新设计和新技术,有望实现功能更为多样、性能更为强大的传感和激光器件,以服务光调制、光探测等多种需求。同时,针对目前分布式传感网络的热点研究,石墨烯的加入会带来整个传感网络灵敏度的提升。目前,基于光纤平台的石墨烯的电控制仍然具有挑战性,实现电可控的石墨烯光纤器件将进一步推进全光纤通信网络的发展,相信这也会成为接下来的一个热点研究方向。
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Article Outline
谭腾, 袁中野, 陈远富, 姚佰承. 基于石墨烯的光纤功能化传感器件和激光器件[J]. 激光与光电子学进展, 2019, 56(17): 170613. Teng Tan, Zhongye Yuan, Yuanfu Chen, Baicheng Yao. Graphene-Based Fiber Functional Sensors and Laser Devices[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170613.
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