光学学报, 2016, 36 (7): 0731001, 网络出版: 2016-07-08   

0.55~0.85 μm波段增透膜的相位调控设计与研制 下载: 516次

Design and Fabrication: Phase Modulated Antireflection Coatings in 0.55~0.85 μm Waveband
作者单位
1 中国科学院上海技术物理研究所, 上海 200083
2 中国科学院红外探测与成像技术重点实验室, 上海 200083
摘要
在0.55~0.85 μm波段范围内,在保证薄膜高透射率的同时对其相位进行调控,是多偏振成像模块项目研制的关键技术。采用等效膜层理论,使用三种氧化物薄膜材料:Ta2O5、Al2O3、SiO2,在光学玻璃H-LaK4L基底上设计并制备了相位调控增透膜。经过工艺优化,研制结果表明,在28°入射条件下,0.55~0.85 μm的波段范围内,薄膜平均透射率大于97%,其相位差小于1°。膜层能够经受航天光学薄膜产品的环境实验的检验,满足了项目的可靠性要求。
Abstract
In the waveband of 0.55~0.85 μm, how to modulate the phases while ensuring high transmittance of thin films is the key technology of multiple polarization imaging module project. Phase modulated antireflection coatings has been designed and fabricated on the substrate H-LaK4L(optical glass) by utilizing asymmetry equivalent layers theory and using three types of oxide coating materials: Ta2O5、Al2O3、SiO2. After process optimization, in the waveband of 0.55~0.85 μm and with the incidence angle of 28°, the results indicate that the average transmittance is greater than 97% while phase difference is less than 1°. The coatings can pass the environmental test required for space optical thin film products, and meet the reliability requirement of the project.
参考文献

[1] 尹欣, 刘定权, 段微波, 等. 近红外波段偏振编码用分色片的设计与制作[J]. 红外与毫米波学报, 2012, 31(6): 505-509.

    Yin Xin, Liu Dingquan, Duan Weibo, et al. Design and fabrication of near-infrared dichroic beam-splitter for polarization state coding[J]. J Infrared Millim Waves, 2012, 31(6): 505-509.

[2] 张朝阳, 程海峰, 陈朝辉, 等. 偏振遥感的研究现状及发展趋势[J]. 激光与红外, 2007, 37(12): 1237-1240.

    Zhang Chaoyang, Cheng Haifeng, Chen Zhaohui, et al. The present research and developing trend of polarization remote sensing[J]. Laser & Infrared, 2007, 37(12): 1237-1240.

[3] 顾培夫, 李海峰, 章岳光, 等. 用于倾斜入射的波分复用薄膜滤光片的特性及改进[J]. 光学学报, 2003, 23(3): 377-380.

    Gu Peifu, Li Haifeng, Zhang Yueguang, et al. Characteristics and improvement of dense wavelength division multiplexing (DWDM) thin film filters used in tilted incidence[J]. Acta Optica Sinica, 2003, 23(3): 377-380.

[4] 顾培夫, 陈卫斌, 刘旭. 薄膜截止滤光片的消偏振设计[J]. 光学学报, 2005, 25(2): 274-278.

    Gu Peifu, Chen Weibin, Liu Xu. Design of depolarization thin film cutoff filters[J]. Acta Optica Sinica, 2005, 25(2) : 274-278.

[5] 王晴云, 齐红基, 贺洪波, 等. 双折射消偏振膜的设计和制备[J]. 光学学报, 2010, 30(7): 2154-2158.

    Wang Qingyun, Qi Hongji, He Hongbo, et al. Design and manufacture of birefringent non-polarizing thin films[J]. Acta Optica Sinica, 2010, 30(7): 2154-2158.

[6] 马小凤, 王丹, 刘定权, 等. 利用等效层的消偏振宽带减反膜设计[J]. 光学学报, 2007, 27(3): 563-566.

    Ma Xiaofeng, Wang Dan, Liu Dingquan, et al. Design of non-polarizing broadband antireflection coating using equivalent layer[J]. Acta Optica Sinica, 2007, 27(3): 563-566.

[7] 艾曼灵, 张梅骄, 金波, 等. 具有低偏振像差的偏振分色合色系统[J]. 光学仪器, 2014, 36(6): 508-512.

    Ai Manlin, Zhang Meijiao, Jin Bo, et al. Polarizing color separator and combiner with low polarizing aberration[J]. Optial Instruments, 2014, 36(6): 508-512.

[8] 徐江峰, 陈秋灵. 增透膜的遗传算法设计[J]. 中国激光, 2007, 34(9): 1271-1275.

    Xu Jiangfeng, Chen Qiuling. Anti-reflection coating designed by genetic algorithm[J]. Chinese J Lasers, 2007, 34(9): 1271-1275.

[9] 唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术[M]. 杭州: 浙江大学出版社, 2006: 154-158.

    Tang Jingfa, Gu Peifu, Liu Xu, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2006: 154-158.

[10] 于天燕, 成效春, 秦杨, 等. 锗窗口红外宽光谱增透膜的研制[J]. 光学学报, 2010, 30(4): 1197-1200.

    Yu Tianyan, Cheng Xiaochun, Qin Yang, et al. Design and manufacture of broadband infrared antireflection coatings for germanium windows[J]. Acta Optica Sinica, 2010, 30(4): 1197-1200.

李大琪, 于天燕, 陈刚, 刘保剑, 余德明, 段微波, 刘定权. 0.55~0.85 μm波段增透膜的相位调控设计与研制[J]. 光学学报, 2016, 36(7): 0731001. Li Daqi, Yu Tianyan, Chen Gang, Liu Baojian, Yu Deming, Duan Weibo, Liu Dingquan. Design and Fabrication: Phase Modulated Antireflection Coatings in 0.55~0.85 μm Waveband[J]. Acta Optica Sinica, 2016, 36(7): 0731001.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!