强激光与粒子束, 2016, 28 (9): 092004, 网络出版: 2016-09-14
射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响
Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane
基本信息
| DOI: | -- |
| 中图分类号: | O539 |
| 栏目: | ICF与激光等离子体 |
| 项目基金: | -- |
| 收稿日期: | 2016-03-14 |
| 修改稿日期: | 2016-04-29 |
| 网络出版日期: | 2016-09-14 |
| 通讯作者: | 陈果 (fightincg@126.com) |
| 备注: | -- |
陈果, 何智兵, 何小珊, 张玲, 唐永建. 射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响[J]. 强激光与粒子束, 2016, 28(9): 092004. Chen Guo, He Zhibing, He Xiaoshan, Zhang Ling, Tang Yongjian. Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane[J]. High Power Laser and Particle Beams, 2016, 28(9): 092004.
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