强激光与粒子束, 2016, 28 (9): 092004, 网络出版: 2016-09-14
射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响
Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane
图 & 表
陈果, 何智兵, 何小珊, 张玲, 唐永建. 射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响[J]. 强激光与粒子束, 2016, 28(9): 092004. Chen Guo, He Zhibing, He Xiaoshan, Zhang Ling, Tang Yongjian. Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane[J]. High Power Laser and Particle Beams, 2016, 28(9): 092004.