射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响

陈果; 何智兵; 何小珊; 张玲; 唐永建

强激光与粒子束, 2016, 28 (9): 092004, 网络出版: 2016-09-14

射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响

Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane

论文大纲

陈果 ^*何智兵何小珊张玲唐永建

作者单位

中国工程物理研究院激光聚变研究中心, 四川绵阳 621900

GDP薄膜朗缪尔探针质谱仪等离子体诊断 glow discharge polymer Langmuir probe mass spectrometer plasma diagnostics

摘要

利用等离子体聚合技术制备的GDP壳层是目前ICF靶丸的主要烧蚀层材料。为了了解GDP薄膜沉积过程中的CH等离子体的状态, 采用朗缪尔探针和质谱仪对C4H8/H2等离子体的组分和状态参数进行了诊断, 并对等离子体的电子能量分布函数、电子密度、电子温度等进行了深入分析。同时讨论了等离子体状态与放电参数之间的关系。研究发现, 射频功率对等离子体参数有明显的影响。从10 W到35 W, 电子密度正比于射频功率。随着射频功率的增加, 在两步电离机制作用下, 电子温度和等离子体电势呈现先减小后增大的变化趋势。另外, 在高气压下, 质谱诊断中发现了大量的稳定的小质量碎片离子, 这表明在高气压下等离子体气相中的离子碎片聚合反应被抑制。

Abstract

The hydrocarbon glow discharge polymer (GDP) shells fabricated by plasma polymerization technology were used as the ablators for ICF targets. In order to understand the properties of hydrocarbon plasma for GDP deposition, plasmas of trans-two-butane and H2 (T2B/H2) were investigated by Langmuir probe and mass spectrometer in the diffusion region. Several parameters, such as electron energy probability functions, electron densities, electron temperature were analyzed. The relationship between the properties of plasma and the discharge parameters were also discussed. It was found that there was a significant modulating effect of the radio frequency (RF) powers on the plasma parameters. The electron density was found to be nearly proportional to the discharge power in the range of 10 W to 35 W. As the RF power increased, the electron temperature and plasma potential decreased at first then increased with discharge power, which was governed by a two-step ionization mechanism. The small and stable fragments, found by mass spectrometer, indicated that the polymerization was suppressed in the gas phase at high RF power.

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陈果, 何智兵, 何小珊, 张玲, 唐永建. 射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响[J]. 强激光与粒子束, 2016, 28(9): 092004. Chen Guo, He Zhibing, He Xiaoshan, Zhang Ling, Tang Yongjian. Effects of RF power on low-pressure inductively coupled plasma of hydrogen and trans-two-butane[J]. High Power Laser and Particle Beams, 2016, 28(9): 092004.

射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响

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