Chinese Optics Letters, 2018, 16 (9): 091402, Published Online: Sep. 6, 2018
Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser 
Download： 643次
Basic Information
| DOI: | 10.3788/COL201816.091402 |
| 中图分类号: | -- |
| 栏目: | Lasers and Laser Optics |
| 项目基金: | This work was supported by the National Natural Science Foundation of China (No. 61705235) and the Innovation Project of the Academy of Opto-Electronics, Chinese Academy of Sciences (No. Y70B03A12Y). |
| 收稿日期: | Feb. 5, 2018 |
| 修改稿日期: | -- |
| 网络出版日期: | Sep. 6, 2018 |
| 通讯作者: | Xin Guo (gx_06@163.com) |
| 备注: | -- |
Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser[J]. Chinese Optics Letters, 2018, 16(9): 091402.
PDF全文
