Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser

Xin Guo; Jinbin Ding; Yi Zhou; Yu Wang

doi:doi:10.3788/COL201816.091402

Chinese Optics Letters, 2018, 16 (9): 091402, Published Online: Sep. 6, 2018

Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser Download： 643次

Xin Guo ^*Jinbin Ding Yi Zhou Yu Wang

Author Affiliations

Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China

Figures & Tables

Fig. 1. Morphology of ablated SiC ceramics at 3.1 J/cm2, 50 pulses: (a) the optical morphology; (b) the 3D profile.

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Fig. 2. (a) Morphology of the matrix and (b) the ablation zone at 3.1 J/cm2, 50 pulses.

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Fig. 3. (a) Morphology and (b) composition of the ablated SiC ceramics at 3.1 J/cm2, 50 pulses.

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Fig. 4. Phases of the SiC zones at 3.1 J/cm2, 50 pulses.

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Fig. 5. Morphology of the SiC with laser fluence of (a) 1.5 J/cm2 and (b) 4 J/cm2, 10 pulses.

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Fig. 6. (a) Ablation depth and (b) oxidation length.

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Fig. 7. Ablation efficiency and ablation depth.

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Xin Guo, Jinbin Ding, Yi Zhou, Yu Wang. Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser[J]. Chinese Optics Letters, 2018, 16(9): 091402.

Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser Download： 643次

Fig. 1. Morphology of ablated SiC ceramics at 3.1 J/cm2, 50 pulses: (a) the optical morphology; (b) the 3D profile.

Fig. 2. (a) Morphology of the matrix and (b) the ablation zone at 3.1 J/cm2, 50 pulses.

Fig. 3. (a) Morphology and (b) composition of the ablated SiC ceramics at 3.1 J/cm2, 50 pulses.

Fig. 4. Phases of the SiC zones at 3.1 J/cm2, 50 pulses.

Fig. 5. Morphology of the SiC with laser fluence of (a) 1.5 J/cm2 and (b) 4 J/cm2, 10 pulses.

Fig. 6. (a) Ablation depth and (b) oxidation length.

Fig. 7. Ablation efficiency and ablation depth.

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Ablation effects and mechanism of sintered silicon carbide ceramics by an ArF excimer laser Download： 643次

Fig. 1. Morphology of ablated SiC ceramics at 3.1 J/cm2, 50 pulses: (a) the optical morphology; (b) the 3D profile.

Fig. 2. (a) Morphology of the matrix and (b) the ablation zone at 3.1 J/cm2, 50 pulses.

Fig. 3. (a) Morphology and (b) composition of the ablated SiC ceramics at 3.1 J/cm2, 50 pulses.

Fig. 4. Phases of the SiC zones at 3.1 J/cm2, 50 pulses.

Fig. 5. Morphology of the SiC with laser fluence of (a) 1.5 J/cm2 and (b) 4 J/cm2, 10 pulses.

Fig. 6. (a) Ablation depth and (b) oxidation length.

Fig. 7. Ablation efficiency and ablation depth.

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