中国激光, 2021, 48 (8): 0802012, 网络出版: 2021-04-15
铜微纳结构的激光直写及其应用研究进展 
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Direct Laser Writing of Micro/Nano Copper Structures and Their Applications
图 & 表
图 1. 典型微纳结构的“自下而上”激光加工。(a)光诱导组装[21];(b)激光烧结(与炉中烧结对比)[27];(c)光诱导水热法合成[28]
Fig. 1. Typical “bottom-up” laser processing of micro/nano structures. (a) Laser-induced assembly[21]; (b) comparison of laser sintering and bulk heating[27]; (c) laser-induced hydrothermal growth[28]
图 2. 基于离子态铜盐前驱体的激光直写典型工艺流程
Fig. 2. Typical manufacturing process of the direct laser writing based on the copper ionic precursor
图 3. 激光工艺参数对直写铜结构的影响[48]。(a)线宽;(b)成分;(c)微观组织
Fig. 3. Effect of laser parameters on the written copper structure[48]. (a) Width of structure; (b) composition;(c) microstructure
图 4. 基于不同前驱体直写所得典型铜微结构的电阻率及微观形貌比较
Fig. 4. Comparison of resistivity and microstructure of the laser written copper structures based on different precursors
图 5. 激光直写铜基复合微纳结构。(a)铜碳复合结构的形成机理示意[45];(b)典型铜碳复合结构的微观形貌及元素分布;(c)铜碳复合结构与铜结构的抗氧化性能比较[47];(d)低激光功率下直写铜氧化物的结构[48]
Fig. 5. Direct laser writing of Cu-based composite micro-nano structure. (a) Schematic diagram of the formation mechanism of the Cu-C composite structure[45]; (b) microstructure and elements distribution of the typical Cu-C composite structure; (c) comparison of oxidation resistance of Cu and Cu-C structures[47]; (d) structure of the directly written Cu oxides at a low laser power[48]
图 6. 导电铜结构的典型应用。(a)柔性电极[47];(b)应变传感器对手指运动的监测[44];(c)接近/触摸传感器对手指触摸的响应[71];(d)柔性平面天线及其频宽[45]
Fig. 6. Typical applications of the conductive Cu structures. (a) Flexible electrode[47]; (b) monitoring the finger movement using the strain sensor[44]; (c) response of the proximity/touch sensor to finger touch[71]; (d) planar antenna and its bandwidth[45]
图 7. 激光直写功能性铜基结构的典型应用。(a)柔性加热器[47];(b)准固态电容器及其循环伏安曲线[46];(c)湿度传感器对呼吸频率的监测[48];(d)温度传感器及其温度响应曲线[84]
Fig. 7. Typical applications of the laser written functional Cu-based structures. (a) Flexible heater[47]; (b) quasi-solid capacitor and its cyclic voltammogram[46]; (c) monitoring the breath rate using the strain sensor[48]; (d) temperature sensor and its temperature response curves[84]
周兴汶, 廖嘉宁, 姚煜, 康慧, 郭伟, 彭鹏. 铜微纳结构的激光直写及其应用研究进展[J]. 中国激光, 2021, 48(8): 0802012. Xingwen Zhou, Jianing Liao, Yu Yao, Hui Kang, Wei Guo, Peng Peng. Direct Laser Writing of Micro/Nano Copper Structures and Their Applications[J]. Chinese Journal of Lasers, 2021, 48(8): 0802012.
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