溅射沉积功率对PZT薄膜的组分、结构和性能的影响
李新曦, 赖珍荃, 王根水, 孙璟兰, 赵强, 褚君浩. 溅射沉积功率对PZT薄膜的组分、结构和性能的影响[J]. 红外与毫米波学报, 2004, 23(4): 313.
李新曦, 赖珍荃, 王根水, 孙璟兰, 赵强, 褚君浩. INFLUENCE OF DEPOSITION POWER ON THE COMPOSITION,STRUCTURE AND PROPERTIES OF PZT THIN FILMS PREPARED BY RF SPUTTERING[J]. Journal of Infrared and Millimeter Waves, 2004, 23(4): 313.
[1] . et al. Structure and electrical properties of Pb(ZrxTi1-x)O3 deposited on textured Pt films[J]. J.Appl.Phys., 2001, 90(4): 1962-1967.
[2] . Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method[J]. J.Appl.Phys., 1999, 85: 7355-7359.
[3] . et al. Lowing of crystallization temperature of sol-gel derived Pb(Zr,Ti)O3 thin films[J]. Integrated Ferroelectrics, 2000, 30: 193-202.
[4] . Analytaical transmission electron microscopy of hydrogen-induced degradation in ferroelectric Pb(Zr,Ti)O3 on a Pt electrodes[J]. Appl.Phys.Lett., 1998, 73(14): 1955-1557.
[5] . Microstructural and electrical properties of Pb(Zr0.52Ti0.48)O3 films grown on p-InSb(111) substrate at low temperatue[J]. J.Phys.and Chem.of Solids, 2000, 61: 529-535.
[6] . Improment on ferroelectric properties of metal-organic decomposited PZT thin film prepared by using prenucleation layer[J]. Integrated Ferroelectrics, 2000, 30: 157-164.
[7] . et al. Effect of substrate material on the crystallinity and epitaxy of Pb(Zr,Ti)O3 thin films[J]. Thin Solid Films, 1999, 347: 106-111.
[8] . Influnce of contact electrodes on leakage characteristics in ferroelectric thin films[J]. J.Appl.Phys., 2001, 90(1): 375-382.
[9] . Effect of textured LaNiO3 electrode on the fatigue improvement of Pb(Zr0.53Ti0.47)O3 thin films[J]. Appl.Phys.Lett., 1996, 68(10): 1430-1432.
[10] Chao G C, Wu J M. Leakage current and fatigue properties of Pb(Zr, Ti) O3 electrodes[J]. Jpn.J.Appl.Phys., 2001, 40(4A): 2417-2422.
[11] . Sun J L. et al. Growth of(100)-oriented LaNiO3 thin films directly on Si substrate by a simple metalorganic decomposition technique for the highly oriented PZT thin films[J]. J.Cryst.Growth, 2000, 220: 100-104.
李新曦, 赖珍荃, 王根水, 孙璟兰, 赵强, 褚君浩. 溅射沉积功率对PZT薄膜的组分、结构和性能的影响[J]. 红外与毫米波学报, 2004, 23(4): 313. 李新曦, 赖珍荃, 王根水, 孙璟兰, 赵强, 褚君浩. INFLUENCE OF DEPOSITION POWER ON THE COMPOSITION,STRUCTURE AND PROPERTIES OF PZT THIN FILMS PREPARED BY RF SPUTTERING[J]. Journal of Infrared and Millimeter Waves, 2004, 23(4): 313.
PDF全文
