一种新的相移点衍射干涉仪系统误差标定方法
[1] P. P. Naulleau, K. A. Goldberg, S. H. Lee. Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy[J]. Appl. Opt., 1999, 38(35): 7252~7263
[2] K. A. Goldberg, P. P. Naulleau, J. Bokor et al.. Honing the accuracy of extreme ultraviolet optical system testing: at-wavelength and visible-light measurements of the ETS Set-2 projection optic[C]. SPIE, 2002, 4688: 329~337
[3] K. A. Goldberg, P. P. Naulleau, P. E. Denham et al.. At-wavelength alignment and testing of the 0.3 NA MET optic[J]. J. Vac. Sci. & Technol. B., 2004, 22(6): 2956~2961
[4] H. Medecki, E. Tejnil, K. A. Goldberg et al.. Phase-shifting point diffraction interferometer[J]. Opt. Lett., 1996, 21(19): 1526~1528
[5] H. Medecki. Phase-shifting point diffraction interferometer[P]. U. S. Patent 5835217, 1998
[6] R. N. Smartt, J. Strong. Point diffraction interferometer[J]. J. Opt. Soc. Am., 1972, 62(5): 737
[7] P. P. Naulleau, K. A. Goldberg, S. H. Lee et al.. Characterization of the accuracy of EUV phase-shifting point diffraction interferometry[C]. SPIE, 1998, 3331: 114~123
[8] E. Jensen. Absolute calibration method for laser Twyman- Green wave-front testing interferometers[J]. J. Opt. Soc. Am., 1973, 63A(10): 1313
[9] K. Elssner, R. Burow, J. Grzanna et al.. Absolute sphericity measurement[J]. Appl. Opt., 1989, 28(21): 4649~4661
[10] Y. Zhu, K. Sugisaki, M. Okada et al.. Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography[J]. Appl. Opt., 2007, 46(27): 6783~6792
[11] 刘克, 李艳秋. 极紫外光刻投影物镜波像差在线检测技术[J]. 中国激光, 2009, 36(s2): 257~262
[12] 李艳秋, 刘克. 相移点衍射干涉仪的关键技术研究[J]. 激光与光电子学进展, 2010, 47(1): 11201
[13] 刘克, 李艳秋. 移相干涉术中有分割遮拦干涉图的相位展开[J]. 光学学报, 2009, 29(7): 1812~1817
刘克, 李艳秋. 一种新的相移点衍射干涉仪系统误差标定方法[J]. 光学学报, 2010, 30(10): 2923. Liu Ke, Li Yanqiu. A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923.