光学 精密工程, 2013, 21 (6): 1425, 网络出版: 2013-07-01
光刻投影物镜中的透镜X-Y柔性微动调整机构
Flexure-based X-Y micro-motion mechanism used in lithographic lens
引用该论文
赵磊, 巩岩, 赵阳. 光刻投影物镜中的透镜X-Y柔性微动调整机构[J]. 光学 精密工程, 2013, 21(6): 1425.
ZHAO Lei, GONG Yan, ZHAO Yang. Flexure-based X-Y micro-motion mechanism used in lithographic lens[J]. Optics and Precision Engineering, 2013, 21(6): 1425.
赵磊, 巩岩, 赵阳. 光刻投影物镜中的透镜X-Y柔性微动调整机构[J]. 光学 精密工程, 2013, 21(6): 1425. ZHAO Lei, GONG Yan, ZHAO Yang. Flexure-based X-Y micro-motion mechanism used in lithographic lens[J]. Optics and Precision Engineering, 2013, 21(6): 1425.