离散点的线轮廓度评价算法

张进; 王仲; 李超; 贡力; 叶声华

光学精密工程, 2008, 16 (11): 2281, 网络出版: 2010-02-28

离散点的线轮廓度评价算法

Evaluation algorithm of curve profile based on discrete points

论文大纲

张进 ^*王仲李超贡力叶声华

作者单位

天津大学精密测试技术及仪器国家重点实验室,天津 300072

线轮廓度误差微型零件最小距离法离散点 linear profile error micro-part minimum distance method discrete point

摘要

为了实现微型零件轮廓的高精度测量,根据其成像特点,提出了一种基于离散点的轮廓度评价算法——被测轮廓与理论轮廓离散点间最小距离法。首先,提取出被测轮廓的边缘点信息,然后,依据理论轮廓计算出一系列间距极小的坐标点并建立坐标系,将被测轮廓点与理论轮廓点对应,最后将计算得出的每个被测轮廓点到最近理论轮廓点的距离作为该点的轮廓度误差。实验结果证明,测量精度优于2 pixel,此方法可有效地提高线轮廓度的评价精度和效率。

Abstract

For achieving high precision measurement of linear profile for micro-parts,an evaluation algorithm of linear profile based on discrete points is proposed according to the imaging characteristics.Firstly,an edge detector is used to obtain the edge of the micro-parts.Then,a series of points with tiny interval can be calculated by the expressions of designed profile and a system coordinate is build for corresponding the points of actual profile and the points of designed profile.Finally,the minimum distance between every point of actual profile and the point of designed profile is taken as the linear profile error of the point.The experimental results show that the error is less than 2 pixel,so the proposed algorithm can significantly improve the precision and efficiency in the measurement of linear profile.

参考文献

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张进, 王仲, 李超, 贡力, 叶声华. 离散点的线轮廓度评价算法[J]. 光学精密工程, 2008, 16(11): 2281. ZHANG Jin, WANG Zhong, LI Chao, GONG Li, YE Sheng-hua. Evaluation algorithm of curve profile based on discrete points[J]. Optics and Precision Engineering, 2008, 16(11): 2281.

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