半导体光电, 2019, 40 (3): 370, 网络出版: 2019-07-09
Ar气流量对磁控溅射AZO导电薄膜红外透光性能的影响
Influence of Ar Flow Rate on Infrared Transmittance of AZO Conductive Film by Magnetron Sputtering
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魏齐, 沈鸿烈, 高凯. Ar气流量对磁控溅射AZO导电薄膜红外透光性能的影响[J]. 半导体光电, 2019, 40(3): 370. WEI Qi, SHEN Honglie, GAO Kai. Influence of Ar Flow Rate on Infrared Transmittance of AZO Conductive Film by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2019, 40(3): 370.
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