中国激光, 2017, 44 (1): 0104004, 网络出版: 2017-01-10
扫描曝光系统中二维工作台x轴测量镜的面形在线检测 下载: 679次
Profile Online Detection for Two-Dimensional Stage x Axis Mirror in Scanning Exposure Systems
图 & 表
图 1. 工作台x轴测量镜的面形误差检测示意图
Fig. 1. Schematic of profile deviation detection for stage x axis mirror
图 2. (a)干涉仪相对位移测量示意图;(b)工作台测量镜零点误差
Fig. 2. (a) Diagram of relative displacement measurement of interferometer; (b) zero error of stage mirror
刘兆武, 李文昊, 巴音贺希格, 宋莹, 姜珊, 李晓天, 吕强. 扫描曝光系统中二维工作台x轴测量镜的面形在线检测[J]. 中国激光, 2017, 44(1): 0104004. Liu Zhaowu, Li Wenhao, Bayanheshig, Song Ying, Jiang Shan, Li Xiaotian, Lü Qiang. Profile Online Detection for Two-Dimensional Stage x Axis Mirror in Scanning Exposure Systems[J]. Chinese Journal of Lasers, 2017, 44(1): 0104004.