激光共焦球面元件姿态自动调整系统

郭浩; 肖阳; 董松; 王龙肖; 赵维谦

doi:doi:10.5768/jao201940.0107001

应用光学, 2019, 40 (1): 132, 网络出版: 2019-04-02

激光共焦球面元件姿态自动调整系统

Laser confocal automatic adjustment system for attitude of spherical component

论文大纲

郭浩肖阳董松王龙肖赵维谦

作者单位

北京理工大学光电学院, 北京 100081

激光共焦自动调整系统四维调整机构球面元件姿态 laser confocal automatic adjustment system four-dimensional adjustment mechanism attitude of spherical component

摘要

为解决激光差动共焦元件参数测量系统中人工调整元件姿态效率低、重复性差的问题, 研制了激光共焦球面元件姿态自动调整系统。基于共焦原理, 建立了元件失调量与电动四维调整机构调整量关系的数学模型, 并根据CCD探测器实时获取的光斑位置信号分析出被测件的姿态信息, 结合闭环反馈控制算法实现姿态自动调整。利用电动四维调整机构搭建了自动调整实验装置, 实验结果表明: 研制的电动调整机构平移调整分辨力达到0.5 μm, 倾斜调整分辨力达到8″; 调整系统能够快速、稳定地将被测件姿态失调量调至误差范围内, 有效提高调整重复性及效率, 对激光差动共焦测量系统实现全自动球面元件参数检测格外重要。

Abstract

In order to solve the problem of poor efficiency and repeatability during adjusting the attitude of spherical components in laser differential confocal components parameters measurement system, we designed a laser confocal automatic adjustment system for attitude of spherical component. Based on the laser confocal principle, we set up the relationship between the component misalignment and the adjusting value of electric four-dimensional adjustment mechanism, analyzed the attitude information of the component according to the airy spot position constantly measured by CCD detectors, and realized the attitude automatic adjustment by using the closed-loop feedback control algorithm. Finally, we built an automatic adjustment experiment device. The experimental results show that the shift adjustment resolution of the electric adjustment mechanism reaches 0.5 μm, and the tilt resolution reaches 10″. The adjustment system can quickly and stably adjust the attitude misalignment of the device under test to the error range, effectively improving the repeatability and efficiency of the adjustment. It is especially important for the laser differential confocal measurement system to realize the automatic measurement of spherical component parameters.

参考文献

[1] SUN Ruoduan, QIU Lirong, YANG Jiamiao, et al. Laser differential confocal radius measurement system［J］. Applied Optics, 2012,51(26): 6275.

[2] WANG Yun, QIU Lirong. Laser differential confocal lens thickness measurement［J］. Measurement Science and Technology, 2012,23(055204): 1-2.

[3] SCHMITZ T L,GARDNER N,VAUGHN M, et al. Improving optical bench radius measurements using stage error motion data［J］. Applied Optics,2008,47(36): 6692-6693.

[4] 徐鹏, 赵维谦, 王方彪, 等.光栅尺测长式激光差动共焦曲率半径测量系统［J］.应用光学, 2014,35(6): 1023-1024.

XU Peng, ZHAO Weiqian, WANG Fangbiao, et al. Laser differential confocal curvature measurement system with grating length［J］. Journal of Applied Optics, 2014,35(6): 1023-1024.

[5] 顾志远, 颜昌翔, 胡春晖, 等.光学系统计算机辅助装调的坐标基准过渡方法［J］.光学学报, 2014, 34(3): 0322003-2.

GU Zhiyuan, YAN Changxiang, HU Chunhui, et al. Coordinate datum transition method for optical system computer-aided alignment［J］. Acta Optica Sinica, 2014, 34(3): 0322003-2.

[6] 姜红.纳米级分辨力重载电控二维倾斜调整架设计［D］.长春: 长春理工大学,2012: 1-3.

JIANG Hong.The structure design of nanometer rResolution overloading electronic two-dimension adjusting frame［D］.Changchun: Changchun University of Science and Technology,2012: 1-3.

[7] WANG Xu, QIU Lirong, ZHAO Weiqian, et al. Error analysis for a laser differential confocal radius measurement system［J］. Applied Optics, 2015, 54(5): 1081-1082.

[8] 王旭, 王中宇, 赵维谦,等.激光差动共焦曲率半径测量不确定度评定［J］.应用光学, 2014,35(1): 155-157.

WANG Xu, WANG Zhongyu, ZHAO Weiqian, et al. Uncertainty evaluation in laser differential confocal radius-of-curvature measurement［J］. Journal of Applied Optics, 2014, 35(1): 155-157.

[9] 张建寰,周军现.测量表面倾角对差动共焦瞄准信号影响分析［J］.光学学报,2006, 26(9): 1365-1366.

ZHANG Jianhuan, ZHOU Junxian. Effect of tilt angle of surface to be measured on differential confocal microscope pointing signal［J］. Acta Optica Sinica, 2006,26(9): 1365-1366.

[10] 章亚男,沈丽丽,沈卫星,等.大口径透镜姿态调整机构的支承分布设计［J］.光学精密工程,2010,18(12): 2626-2628.

ZHANG Yanan, SHEN Lili, SHEN Weixing, et al. Design of support distribution for attitude-adjusting mechanism of large lens［J］. Optics and Precision Engineering, 2010,18(12): 2626-2628.

[11] 张丽敏,吴元昊.45°倾斜镜多自由度精调结构设计研究［J］.光子学报,2010,39(12): 2139-3140.

ZHANG Limin, WU Yuanhao. Design of multiple DOF fine tuning mechanism for 45°tilting mirror［J］. Acta Photonica Sinica, 2010,39(12): 2139-3140.

[12] 罗勇.多维精密光学调整架坐标解耦合分析［J］.光电工程, 2011,38(4): 37-40.

LUO Yong. Coordinates-decoupling of multidimensional precision optical aadjusting frame［J］.Opto-Electronic Engineering, 2011, 38(4): 37-40.

[13] 鱼胜利, 周建勋, 肖虹.大口径光学元件透反射检测调整工装的研制与分析［J］.工具技术, 2018,52(3): 136-137.

YU Shengli, ZHOU Jianxun, XIAO Hong. Development and analysis of adjusting tool for transmission and reflectance detection of large aperture optical element［J］. Tool Engineering, 2018,52(3): 136-137.

郭浩, 肖阳, 董松, 王龙肖, 赵维谦. 激光共焦球面元件姿态自动调整系统[J]. 应用光学, 2019, 40(1): 132. GUO Hao, XIAO Yang, DONG Song, WANG Longxiao, ZHAO Weiqian. Laser confocal automatic adjustment system for attitude of spherical component[J]. Journal of Applied Optics, 2019, 40(1): 132.

激光共焦球面元件姿态自动调整系统

关于本站 Cookie 的使用提示

全站搜索

激光共焦球面元件姿态自动调整系统

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索