基于白光扫描干涉术的非球面光学元件大范围评价方法

马龙; 张鸿燕; 牛一凡; 郭彤

doi:doi:10.3788/lop51.061207

激光与光电子学进展, 2014, 51 (6): 061207, 网络出版: 2014-05-20

基于白光扫描干涉术的非球面光学元件大范围评价方法

Large Range Evaluation Method Based on White Light Scanning Interferometry for Aspheric Optical Elements

论文大纲

马龙 ^1,*张鸿燕 ¹牛一凡 ¹郭彤 ²

作者单位

¹ 中国民航大学中欧航空工程师学院, 天津 300300

² 天津大学精密测试技术及仪器国家重点实验室, 天津 300072

摘要

通过白光扫描干涉术研究了用于非球面元件的大范围测量方法并利用纳米测量机（NMM）构建了测量系统。对系统的运行环境进行分析，定量给出了评定结果。在系统环境得以保证的前提下，重点研究了无重叠拼接方法，并将结果进行了对比；针对周期性非球面光学表面，提出通过白光倾斜扫描干涉法进行测量。扫描过程中，测试样品倾斜通过干涉区，消除了物镜视场的影响，使毫米量级表面一次扫描即可完成测量。针对扫描过程，分析了扫描过程中干涉条纹移出视场现象及双角度不一致对测量结果的影响。

Abstract

White light interferometry is employed to research on the measurement technology for large scale evaluation and a dedicated system is developed on the platform of nano-measuring maching (NMM). Firstly, this work calibrates the environment effects and the results are given quantitatively. Secondly, under the condition of the precise environment control, the non- overlapping stitching method is investigated, and the comparison of the results is also made; For non- periodic array aspheric optical surface, white light tilted scanning interferometry is employed to perform the large range measurement. During the scan, the specimen moves through the coherence area along a sloping direction, and the objective field of view limitation is removed. ence, within one round of scan, the surface in millimetre scale can be successfully evaluated. For the scanning process, this article analyzes the interferogram slipping out and the impact due to the difference of the two angles appeared in this technology. Finally, the comparison between the above two methods is given.

参考文献

[1] 张斌, 王鸣, 马力. 非球面的光学测试技术[J]. 南昌大学学报(工学版), 2003, 25(2): 51-54.

Zhang Bin, Wang Ming, Ma Li. Optical testing technique for aspherical surface[J]. Journal of Nanchang University (Engineering & Technology), 2003, 25(2): 51-54.

[2] 张鹏, 赵春竹, 崔庆丰. 航空共形光学窗口的设计方法[J]. 光学学报, 2013, 33(6): 0622006.

Zhang Peng, Zhao Chunzhu, Cui Qingfeng. Design method of an aerial conformal optical window[J]. Acta Optica Sinica, 2013, 33(6): 0622006.

[3] 巩盾, 田铁印, 王红. 含有非球面的宽波段大相对孔径星敏感器光学系统设计[J]. 光学学报, 2013, 33(8): 0822001.

Gong Dun, Tian Tieyin, Wang Hong. Design of wide band and large relative aperture star sensor optical system with asphere[J]. Acta Optica Sinica, 2013, 33(8): 0822001.

[4] 罗松保, 张建明. 非球面曲面光学零件超精密加工装备与技术[J]. 光学精密工程, 2003, 11(1): 75-78.

Luo Songbao, Zhang Jianming. Ultraprecision machining equipment and technology of aspheric optics[J]. Optics and Precision Engineering, 2003, 11(1): 75-78.

[5] P E Murphy, T G Brown, D T Moore. Interference imaging for aspheric surface testing[J]. Appl Opt, 2000, 39(13): 2122-2129.

[6] H P Stahl. Aspheric surface testing techniques[C]. SPIE, 1990, 1332: 66-76.

[7] L C Chen, A M Tapilouw. Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry of M(O)EMS dynamic characterization[J]. Journal of Micromechanics and Microengineering, 2013, 23(11): 115008.

[8] D W Kim, S H Kim, S H Lee, et al.. A new method of measuring localized chromatic dispersion of structured nanowaveguide dcvices using white-light interferometry[J]. J Lightwave Technol, 2012, 30(1): 43-48.

[9] I Shavrin, L Lipiainen, K Kokkonen, et al.. Stroboscopic white-light interferometry of vibrating microstructures[J]. Opt Express, 2013, 21(14): 16901-16907 .

[10] A Pacholik, M Mueller, W Fengler, et al.. GPU vs FPGA: example application on white light interferometry[C]. 2011 International Conference on Reconfigurable Computing and FPGAS, 2011. 481-486.

[11] 高松涛, 隋永新, 杨怀江. 用计算全息图对非球面的高精度检测与误差评估[J]. 光学学报, 2013, 33(6): 0612003.

Gao Songtao, Sui Yongxin, Yang Huaijiang. High precise testing of asphere with computer- generated hologram and error evaluation[J]. Acta Optica Sinica, 2013, 33(6): 0612003.

[12] 李建欣, 朱荣刚, 崔艳军, 等. 基于条纹反射的非球面测量及系统结构分析[J]. 光学学报, 2012, 32(s1): s112003.

Li Jianxin, Zhu Ronggang, Cui Yanjun, et al.. Aspheric surface measurement based on fringe reflection and analysis of system′s structure[J]. Acta Optica Sinica, 2012, 32(s1): s112003.

[13] 龙夫年, 郭秀梅, 刘剑峰. 利用ZYGO 干涉仪进行非球面检测技术研究[J]. 哈尔滨工业大学学报, 2005, 37(2): 231-233.

Long Funian, Guo Xiumei, Liu Jianfeng. Technical study for testing of aspheres by using ZYGO interferometer[J]. Journal of Harbin Institute of Technology, 2005, 37(2): 231-233.

[14] A Olszak. Lateral scanning white-light interferometry[J]. Appl Opt, 2000, 39(22): 3906-3913.

[15] H Fan, I Reading, Z P Fang. Research on tilted choerent plane white light interferometry for wafer bump 3D inspection [J]. SIM Tech Tech Rep, 2006, 7(1): 59-63.

[16] F Munteanu. Self-calibrating lateral scanning white-light interferometry[J]. Appl Opt, 2010, 49(12): 2371-2375.

[17] 张华俊, 李桂华, 刘程, 等. 基于SURF 特征匹配的数字图像相关变形初值可靠估计[J]. 光学学报, 2013, 33(11): 1112005.

Zhang Huajun, Li Guihua, Liu Cheng, et al.. Reliable initial guess based on SURF feature matching in digital image correlation[J]. Acta Optica Sinica, 2013, 33(11): 1112005.

[18] K Choi, H Choi, S Y Lee, et al.. Fingerprint image mosaicking by recursive ridge mapping[J]. IEEE Transactions on Systems, Man, and Cybernetics-Part B: Cybernetics, 2007, 37(5): 1191-1203.

[19] T Hausotte, B Percle, G Jaeger. Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine[J]. Measurement Science and Technology, 2009, 20(18): 084004.

[20] Y B Yuan, T V Vorburger, J F Song, et al.. A simplified realization for the Gaussian filter in surface metrology[C]. International Colloquium on Surface, 2000. 133-144.

马龙, 张鸿燕, 牛一凡, 郭彤. 基于白光扫描干涉术的非球面光学元件大范围评价方法[J]. 激光与光电子学进展, 2014, 51(6): 061207. Ma Long, Zhang Hongyan, Niu Yifan, Guo Tong. Large Range Evaluation Method Based on White Light Scanning Interferometry for Aspheric Optical Elements[J]. Laser & Optoelectronics Progress, 2014, 51(6): 061207.

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