原子层沉积法制备高反射率的分布式布拉格反射镜
万颖, 吴昊, 刘昌. 原子层沉积法制备高反射率的分布式布拉格反射镜[J]. 半导体光电, 2019, 40(4): 528.
WAN Ying, WU Hao, LIU Chang. Preparation of High Reflectivity Distributed Bragg Mirrors Based on Atomic Layer Deposition[J]. Semiconductor Optoelectronics, 2019, 40(4): 528.
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万颖, 吴昊, 刘昌. 原子层沉积法制备高反射率的分布式布拉格反射镜[J]. 半导体光电, 2019, 40(4): 528. WAN Ying, WU Hao, LIU Chang. Preparation of High Reflectivity Distributed Bragg Mirrors Based on Atomic Layer Deposition[J]. Semiconductor Optoelectronics, 2019, 40(4): 528.