半导体光电, 2019, 40 (4): 528, 网络出版: 2019-09-20
原子层沉积法制备高反射率的分布式布拉格反射镜
Preparation of High Reflectivity Distributed Bragg Mirrors Based on Atomic Layer Deposition
补充材料
万颖, 吴昊, 刘昌. 原子层沉积法制备高反射率的分布式布拉格反射镜[J]. 半导体光电, 2019, 40(4): 528. WAN Ying, WU Hao, LIU Chang. Preparation of High Reflectivity Distributed Bragg Mirrors Based on Atomic Layer Deposition[J]. Semiconductor Optoelectronics, 2019, 40(4): 528.