飞秒激光参数对石英玻璃微孔加工的影响

邢松龄; 刘磊; 邹贵生; 张学谦; 白海林; Y N

doi:doi:10.3788/cjl201542.0403001

中国激光, 2015, 42 (4): 0403001, 网络出版: 2015-03-25

飞秒激光参数对石英玻璃微孔加工的影响下载： 1033次

Effects of Femtosecond Laser Parameters on Hole Drilling of Silica Glass

论文大纲

邢松龄 ^1,*刘磊 ¹邹贵生 ¹张学谦 ¹白海林 ¹Y N ^1,2

作者单位

¹ 清华大学机械工程系先进成形制造教育部重点试验室, 北京 100084

² Department of Mechatronics and Mechanical Engineering, University of Waterloo, Canada, N2L 3G1

超快光学飞秒激光微孔加工石英玻璃倍频 ultrafast optics femtosecond laser micro-hole drilling fused silica frequency-double

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摘要

微孔加工是微器件加工中的重要环节，飞秒激光的强烈非线性吸收和“冷加工”特性使其在玻璃微纳加工方面有独特的优势和应用前景。选用石英玻璃作为试验材料，研究飞秒激光参数对微孔深径比及形貌的影响。结果表明，飞秒激光脉冲能量、打孔速度对微孔深径比存在较大影响。随着激光能量和打孔速度的增加，微孔深径比均呈现减小趋势。通过选择适当参数，可以获得深径比大于25∶1 且孔形较好、无明显裂纹的长直微孔。为了获得更好的聚焦效果，采用倍频晶体BBO 获得了400 nm 波长的飞秒激光。用相同聚焦透镜时400 nm 飞秒激光加工的微孔比800 nm 更小。此外，也对飞秒激光微孔加工中常见的缺陷进行了分析。

Abstract

Micro-hole drilling is an important process for microfluidic device fabrication. Owing to its strong nonlinear absorption and‘cold’processing on materials, femtosecond laser is a promising tool for micromachining of glass. In the present study, effects of femtosecond laser parameters on hole drilling of silica glass are studied. The results show that both laser energy and processing speed affect the hole diameter and depth. When selecting proper parameters, long and straight micro-holes with no obvious crack and aspect ratio over 25∶1 can be obtained. Furthermore, in order to obtain better focusing-condition, the frequency doubling crystal beta-barium borate (BBO) is used to obtain 400 nm wavelength femtosecond laser. Compared with 800 nm wavelength, 400 nm femtosecond laser can get smaller hole diameter under the same focusing lens. Defects during femtosecond laser hole drilling are discussed as well.

参考文献

[1] C Rubbia, E Fermi. Corrosion news[J]. Materials and Corrosion, 2013, 64(11): 1039.

[2] 安然. 玻璃中微流控芯片元件的飞秒激光制备[D]. 北京: 北京大学, 2006.

An Ran. Femtosecond Laser Fabrication of Elements of Glass Microfluidic Chips[D]. Beijing: Peking University, 2006.

[3] 夏博, 姜澜, 王素梅, 等. 飞秒激光微孔加工[J]. 中国激光, 2013, 40(2): 0201001.

Xia Bo, Jiang Lan, Wang Sumei, et al.. Femtosecond laser drilling of micro-holes[J]. Chinese J Lasers, 2013, 40(2): 0201001.

[4] 孙思明, 孙允陆, 刘东旭, 等. 飞秒激光直写制备蛋白质功能化器件[J]. 激光与光电子学进展, 2013, 50(8): 080003.

Sun Siming, Sun Yunlu, Liu Dongxu, et al.. Protein functional devices manufactured by femtosecond laser direct writing[J]. Laser & Optoelectronics Progress, 2013, 50(8): 080003.

[5] Y L Sun, D X Liu, W F Dong, et al.. Tunable protein harmonic diffractive micro-optical elements[J]. Opt Lett, 2012, 37(14): 2973-2975.

[6] H Xia, J Wang, Y Tian, et al.. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization [J]. Advanced Materials, 2010, 22(29): 3204-3207.

[7] K Liu, Q Yang, Y Zhao, et al.. Three-dimensional metallic microcomponents achieved in fused silica by a femtosecond-laser-based microsolidifying process[J]. Microelectronic Engineering, 2014, 113: 93-97.

[8] A C Forsman, E H Lundgren, A L Dodell, et al.. Double-pulse format for improved laser drilling-Second pulse enhances both drilling speed and hole quality[J]. Photonics Spectra, 2007, 41(9): 72-+.

[9] I Miyamoto. Laser materials processing in Japan[J]. Laser Technik Journal, 2008, 5(3): 16-20.

[10] T Juhasz, L H Loesel, R M Kurtz, et al.. Corneal refractive surgery with femtosecond lasers[J]. IEEE Journal of Selected Topics in Quantum Electronics, 1999, 5(4): 902-910.

[11] A Heisterkamp, I Z Maxwell, E Mazur, et al.. Pulse energy dependence of subcellular dissection by femtosecond laser pulses[J]. Opt Express, 2005, 13(10): 3690-3696.

[12] 位迪, 程萍, 陈向东, 等. 基于飞秒激光加工非金属血管支架的工艺研究[J]. 激光与光电子学进展, 2013, 50(9): 091403.

Wei Di, Cheng Ping, Chen Xiangdong, et al.. Study on femtosecond laser processing of nonmetal vascular stent[J]. Laser & Optoelectronics Progress, 2013, 50(9): 091403.

[13] 王锋, 罗建军, 李明. 飞秒激光高精细加工柴油机喷油嘴倒锥孔法[J]. 光子学报, 2014, 43(4): 0414003.

Wang Feng, Luo Jianjun, Li Ming. High-precision method of machining taper holes of diesel engine nozzle with femtosecond laser [J]. Acta Photonica Sinica, 2014, 43(4): 0414003.

[14] 林金堵, 吴海珠. 精细微孔的激光加工的发展[J]. 印制电路信息, 2014, (1): 26-29.

Lin Jindu, Wu Haizhu. The process development of laser in fine micro-hole[J]. Printed Circuit Information, 2014, (1): 26-29.

[15] C B Schaffer, A Brodeur, E Mazur. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology, 2001, 12(11): 1784.

[16] B N Chichkov, C Momma, S Nolte, et al.. Femtosecond, picosecond and nanosecond laser ablation of solids[J]. Applied Physics A, 1996, 63(2): 109-115.

[17] 何飞, 程亚. 飞秒激光微加工: 激光精密加工领域的新前沿[J]. 中国激光, 2007, 34(5): 595-622.

He Fei, Cheng Ya. Femtosecond laser micromachining: frontier in laser precision micromachining[J]. Chinese J Lasers, 2007, 34(5): 595-622.

[18] K H Leitz, B Redlingshofer, Y Reg, et al.. Metal ablation with short and ultrashort laser pulses[J]. Physics Procedia, 2011, 12: 230-238.

邢松龄, 刘磊, 邹贵生, 张学谦, 白海林, . 飞秒激光参数对石英玻璃微孔加工的影响[J]. 中国激光, 2015, 42(4): 0403001. Xing Songling, Liu Lei, Zou Guisheng, Zhang Xueqian, Bai Hailin, Y N. Effects of Femtosecond Laser Parameters on Hole Drilling of Silica Glass[J]. Chinese Journal of Lasers, 2015, 42(4): 0403001.

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