Photonic Sensors, 2017, 7 (2): 171–181, Published Online: May. 9, 2017  

Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model

Author Affiliations
1 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
2 University of Chinese Academy of Sciences, Beijing, 100049, China
3 Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, 130033, China
Basic Information
DOI: 10.1007/s13320-017-0400-x
中图分类号: --
栏目: Regular
项目基金: This research is financially supported by the National Natural Science of China (NSFC) (61210015) and Youth Foundation of National Natural Science Foundation (61605202).
收稿日期: Nov. 3, 2016
修改稿日期: --
网络出版日期: May. 9, 2017
通讯作者: Chi SONG (songchi7787@126.com)
备注: --

Chi SONG, Xuejun ZHANG, Xin ZHANG, Haifei HU, Xuefeng ZENG. Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model[J]. Photonic Sensors, 2017, 7(2): 171–181.

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