Photonic Sensors, 2017, 7 (2): 171–181, Published Online: May. 9, 2017
Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model
Optics design and fabrication Optics design and fabrication optics fabrication optics fabrication polishing polishing
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Chi SONG, Xuejun ZHANG, Xin ZHANG, Haifei HU, Xuefeng ZENG. Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model[J]. Photonic Sensors, 2017, 7(2): 171–181.