Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model

Chi SONG; Xuejun ZHANG; Xin ZHANG; Haifei HU; Xuefeng ZENG

doi:doi:10.1007/s13320-017-0400-x

Photonic Sensors, 2017, 7 (2): 171–181, Published Online: May. 9, 2017

Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model

Chi SONG ^1,2,*Xuejun ZHANG ^1,3Xin ZHANG ^1,3Haifei HU ^1,3Xuefeng ZENG ^1,3

Author Affiliations

¹ Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China

² University of Chinese Academy of Sciences, Beijing, 100049, China

³ Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, 130033, China

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Chi SONG, Xuejun ZHANG, Xin ZHANG, Haifei HU, Xuefeng ZENG. Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model[J]. Photonic Sensors, 2017, 7(2): 171–181.

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