摆臂式轮廓测量不同母线条数的敏感性分析

为了确定摆臂式轮廓检测大口径离轴非球面采用不同扫描线数时系统检测误差的敏感性, 文中提出采用蒙特卡洛方法, 建立了仿真分析的模型。对母线条数分别为8~120条的模式进行模拟检测, 对系统噪声引入的面形误差进行Zernike多项式项拟合, 统计分析得母线条数为8~39条时, 系统噪声引入的低阶项检测误差随母线条数的增加而迅速降低; 母线条数为40~70条时, 引入低阶项检测误差降低缓慢; 71~120条时, 引入的低阶项检测误差几乎保持不变。结合实例, 对一口径1 500 mm的离轴非球面反射镜进行实验, 分别采用36条、72条和96条母线进行面形检测。36条母线检测误差相对较大, 检测结果为7.73 μm PV和0.68 μm RMS;72条母线和96条母线检测结果十分接近, 分别为5.755 μm PV, 0.568 μm RMS和 5.612 μm PV, 0.569 μm RMS。验证了仿真分析结果的准确性, 为摆臂式轮廓检测大口径离轴非球面中母线条数的优化选择提供了理论指导。

Abstract

To analyze test errors induced from system noise of swing arm profilometer (SAP) testing large aperture off-axis aspherics with different scan arcs, based on the Monte Carlo method, the simulation test model was built with different scan patterns from 8 arcs to 120 arcs. To evaluate the test sensitivity, test errors induced from system noise was fitted by Zernike polynomial. The low order test errors were reduced rapidly as scan arcs increased from 8 arcs to 39 arcs, and reduced slowly from 40 arcs to 70 arcs, and kept almost the same from 71 arcs to 120 arcs. As an experiment, a Φ1 500 mm off-axis aspheric mirror was tested by SAP scanning in 36 arcs, 72 arcs and 96 arcs respectively. The surface test error of 36 arcs are much larger with result of 7.73 μm in Peak-Valley (PV) and 0.68 μm in Root-Mean-Square(RMS). The surface test error of 72 arcs and 96 arcs are much close with result of 5.755 μm PV, 0.568 μm RMS and 5.612 μm PV, 0.569 μm RMS respectively. So the simulation results were verified and provided a guide for the scan line selection for SAP testing large off-axis aspherics.

参考文献

[1] Anderson D S, Parks R E. A versatile profilometer for the measurement of aspherics [C]//OF&T Workshop Technical Digest, CA, 1990.

[2] Anderson D S, Burge J H. Swing-arm profilometry of aspherics [C]//Proc SPIE, 1995, 2536: 169-179.

[3] Su P, Oh C J, Parks R E, et al. Swing arm optical CMM for aspherics [C]//Proc SPIE, 2009, 7426: 74260J.

[4] Burge J H. Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces [C]//Proc SPIE, 2009, 7426: 7426L.

[5] Zhang Peng, Li Jie, Yu Guoyu, et al. Development of swinging part profilometer for optics[C]//Optics and Measurement 2016 International Conference, 2016: 101510B.

[6] 魏中伟. 摆臂式轮廓仪工件转台误差分离技术研究[D]. 成都: 中国科学院光电技术研究所, 2014: 38-39.

Wei Zhongwei. Study on the error separation for the rotary table of swing arm profilometer[D]. Chengdu: Institute of Optics and Electronics, Chinese Academy of Sciences, 2014: 38-39. (in Chinese)

[7] Lin Chen, Jing Hongwei, Wei Zhongwei, et al. Research on the measurement technology of effective arm length of swing arm profilometer [C]//Proc SPIE, 2014, 9280: 92800P.

[8] Gao Mingxing, Jing Hongwei, Fan Tianquan, et al. Calibrating the axes of the swing arm profilometer by the four-based laser trackers[C]//Proc SPIE, 2015, 9623: 96230M.

[9] 贾立德, 郑子文, 戴一帆, 等. 摆臂式非球面轮廓仪的原理与试验[J]. 光学精密工程, 2007, 15(4): 499-504.

Jia Lide, Zheng Ziwen, Dai Yifan, et al. Principle and experiments of swing-arm profilometer[J]. Optics and Precision Engineering, 2007, 15(4): 499-504. (in Chinese)

[10] 戚二辉, 罗霄, 郑立功,等. 大口径非圆形光学平面的五棱镜扫描检测技术研究[J]. 光电子·激光, 2014, 25(7): 1370-1375.

Qi Erhui, Luo Xiao, Zheng Ligong, et al. Optical testing of large optical flat mirror with non-circular pupil based on scanning pentaprism technology [J]. Journal of Optoelectronics Laser, 2014, 25(7): 1370-1375. (in Chinese)

[11] 戚二辉, 罗霄, 李明,等. 五棱镜扫描技术检测大口径平面镜的误差分析[J]. 红外与激光工程, 2015, 44(2): 639-646.

Qi Erhui, Luo Xiao, Li Ming, et al. Error analysis of scanning pentaprism system in optical testing on large aperture flat mirror.[J] Infrared and Laser Engineering, 2015, 44(2): 639-646. (in Chinese)

[12] 熊玲, 罗霄, 刘振宇, 等. 2 m量级SiC非球面反射镜的摆臂轮廓检测[J]. 光学学报, 2015, 35(12): 1212002.

Xiong Ling, Luo Xiao, Liu Zhenyu, et al. Measurement of 2 m SiC aspheric mirror based on swing arm profilometer[J]. Acta Optica Sinica, 2015, 35(12): 1212002. (in Chinese)

熊玲, 罗霄, 戚二辉, 张峰, 薛栋林, 张学军. 摆臂式轮廓测量不同母线条数的敏感性分析[J]. 红外与激光工程, 2018, 47(2): 0217003. Xiong Ling, Luo Xiao, Qi Erhui, Zhang Feng, Xue Donglin, Zhang Xuejun. Sensitivity analysis of different scan arcs for swing arm profilometer test[J]. Infrared and Laser Engineering, 2018, 47(2): 0217003.

摆臂式轮廓测量不同母线条数的敏感性分析

关于本站 Cookie 的使用提示

全站搜索

摆臂式轮廓测量不同母线条数的敏感性分析

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索