外差干涉仪混频误差分析
[1] . Bobroff. Residual errors in laser interferometry from air turbulence and nonlinearity[J]. Appl. Opt., 1987, 26(13): 2676-2682.
[2] . Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Precision Engineering, 1992, 14(2): 91-98.
[3] . Error analysis of frequency mixing for heterodyne interferometer[J]. Acta Metrologica Sinica, 1999, 20(3): 166-171.
[6] Zhao Huijie. Heterodyne testing technique and its applications in micro-maching [J]. Optics and Precision Engineering, 2003, 11(1): 98~103
赵慧洁. 适合于微细加工的外差探测技术及应用 [J]. 光学精密工程, 2003, 11(1): 98~103
[8] Liu Haining, Li Zhen. Polarization properties of retrorefector [J]. Laser Journal, 2000, 21(1): 15~16, 25
刘海宁,李真. 角锥棱镜的偏振效应 [J]. 激光杂志, 2000, 21(1): 15~16, 25
[9] Zhao Huijie. Influence of metal mirror to measurement accuracy in heterodyne interferometer [J]. Chinese J. Scientific Instrument, 2001, 22(6): 602~605
赵慧洁. 外差干涉仪中金属反射镜对测量精度的影响 [J]. 仪器仪表学报, 2001, 22(6): 602~605
[10] Xu Jiahua. Engineering Optics for Metrology [M]. Beijing: China Machine Press, 1984
徐家骅. 计量工程光学 [M]. 北京: 机械工业出版社, 1984
宁志高, 程兆谷, 高海军. 外差干涉仪混频误差分析[J]. 中国激光, 2005, 32(6): 852. 宁志高, 程兆谷, 高海军. Error Analysis of Frequency Mixing for Heterodyne Interferometer[J]. Chinese Journal of Lasers, 2005, 32(6): 852.