光学学报, 2019, 39 (3): 0324001, 网络出版: 2019-05-10
基于原子层沉积技术的石英管表面减反射膜的制备 
下载： 1027次
Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition
引用该论文
沐雯, 沈伟东, 杨陈楹, 郑晓雯, 王震, 袁华新, 袁文佳, 章岳光. 基于原子层沉积技术的石英管表面减反射膜的制备[J]. 光学学报, 2019, 39(3): 0324001.
Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001.
沐雯, 沈伟东, 杨陈楹, 郑晓雯, 王震, 袁华新, 袁文佳, 章岳光. 基于原子层沉积技术的石英管表面减反射膜的制备[J]. 光学学报, 2019, 39(3): 0324001. Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001.
PDF全文
