光学学报, 2019, 39 (3): 0324001, 网络出版: 2019-05-10 复制并引用该论文  本文已被引 3 次  被引通知

图 & 表

图 1. 石英管夹具和石英管上测试点示意图。 (a)石英管夹具;(b)测试点

Fig. 1. Schematic of quartz tube holder and various testing points on quartz tube. (a) Quartz tube holder; (b) testing points

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图 2. 单层膜的厚度均匀性分布。(a) Al2O3薄膜;(b) TiO2薄膜

Fig. 2. Thickness uniformity distribution of single layer. (a) Al2O3 film; (b) TiO2 film

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图 3. 材料折射率和消光系数。(a) Al2O3折射率;(b) TiO2折射率和消光系数

Fig. 3. Refractive index and extinction coefficient of materials. (a) Refractive index of Al2O3; (b) refractive index and extinction coefficient of TiO2

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图 4. 单波长550 nm减反射膜的反射率曲线

Fig. 4. Experimental and simulated reflectivities of single wavelength 550 nm AR coating

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图 5. 不同外径石英管外壁的中心波长偏差。(a)外壁圆周方向;(b)外壁轴向

Fig. 5. Central wavelength deviations on outer surfaces of quartz tubes with different outer diameters. (a) Circumferential direction of outer surface; (b) axial direction of outer surface

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图 6. 不同内径石英管内壁的中心波长偏差。(a)内壁圆周方向;(b)内壁轴向

Fig. 6. Central wavelength deviations on inner surfaces of quartz tubes with different inner diameters. (a) Circumferential direction of inner surface; (b) axial direction of inner surface

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图 7. 不同长度石英管内外壁的轴向中心波长偏差。(a)内壁轴向;(b)外壁轴向

Fig. 7. Axial central wavelength deviations on inner and outer surfaces of quartz tubes with different lengths. (a) Axial direction of inner surface; (b) axial direction of outer surface

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图 8. 外径为40 mm,内径为34 mm,长度为50 mm石英管的中心波长分布。(a)外壁;(b)内壁

Fig. 8. Central wavelength distributions of quartz tube with outer diameter of 40 mm, inner diameter of 37 mm, and length of 50 mm. (a) Outer surface; (b) inner surface

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表 1基于ALD技术制备Al2O3和TiO2的工艺参数

Table1. Process parameters for preparation of Al2O3 and TiO2 based on ALD technology

Material Substrate temperature /℃ First reactant(pulse time) Purge gas(purge time) Second reactant (pulse time) Purge gas(purge time) TiO2 120 TiCl4(0.35 s) N2(6 s) H2O(0.3 s) N2(8 s) Al2O3 120 TMA(0.50 s) N2(6 s) H2O(0.3 s) N2(8 s)

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表 2石英管尺寸

Table2. Quartz tube size

Experimental group Outer diameter/mm Inner diameter/mm Length/mm 23 20 20 1 26 20 20 30 20 20 40 37 20 2 40 34 20 40 30 20 40 34 30 3 40 34 40 40 34 50

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表 3不同外径石英管的外壁非均匀性

Table3. Non-uniformity on outer surfaces of quartz tubes with different outer diameters

Outer diameter /mm Circumferential non-uniformity /% Axial non-uniformity /% Total non-uniformity /% Total non-uniformity except ±150° /% Total averagecenter wavelength /nm 23 1.00 0.27 1.97 1.69 547 26 1.13 0.50 1.73 1.04 549 30 1.18 0.36 1.91 1.50 549

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表 4不同内径石英管的内壁非均匀性

Table4. Non-uniformity on inner surfaces of quartz tubes with different inner diameters

Inner diameter /mm Circumferential non-uniformity /% Axial non-uniformity /% Total non-uniformity /% Total averagecenter wavelength /nm 37 0.68 0.68 1.59 551 34 0.36 0.72 1.49 552 30 0.49 0.59 1.26 553

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表 5不同长度石英管的内壁和外壁均匀性

Table5. Uniformity of inner and outer surfaces of quartz tubes with different lengths

Position Length /mm Circumferential non-uniformity /% Axial non-uniformity /% Total non-uniformity /% Total averagecenter wavelength /nm 30 0.78 0.78 1.10 543 Inner surface 40 0.37 0.83 1.48 542 50 0.50 0.64 1.42 544 30 0.83 0.64 1.29 544 Outer surface 40 0.46 0.27 1.47 546 50 0.69 0.60 1.65 544

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沐雯, 沈伟东, 杨陈楹, 郑晓雯, 王震, 袁华新, 袁文佳, 章岳光. 基于原子层沉积技术的石英管表面减反射膜的制备[J]. 光学学报, 2019, 39(3): 0324001. Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001.