光学学报, 2011, 31 (5): 0523005, 网络出版: 2011-05-09   

数字微镜器件用于并行共焦测量的再研究

Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device
作者单位
合肥工业大学仪器科学与光电工程学院, 安徽 合肥 230009
摘要
数字微镜器件(DMD)可以控制其中每个微镜的偏转状态,相对于其他光分束器件,它可以构建出点光源大小可变、间距可调的柔性阵列光源。在前期研究的基础上,理论上推导出该阵列光源可以用于并行共焦测量,改进了测量光路,并结合实际使用找到了合适的阵列光源参数,获知了并行共焦测量系统的纵向分辨率与点光源大小的关系,最终通过对实物的测量较完善地阐述了基于DMD的并行共焦测量系统。
Abstract
Compared with other beam splitting devices, digital micromirror device (DMD) can control the deflection state of every micromirror, which can construct the flexible array light source with tunable size of point light source and distance. Based on the previous researches, the theoretical model of DMD is deduced and the optical path of measurement is improved. Combined with actual usage, the suitable parameters of array light source are found. The relation between longitudinal resolution of parallel confocal microscope and the size of point light source is gotten. Finally, the parallel confocal measurement system based on DMD is proved by experiments.
参考文献

[1] M. Minsky. Microscopy Apparatus [P]. U. S. Patent 3013467, 1961

[2] T. Wilson. Confocal Microscopy [M]. New York:Academic Press,1990

[3] 王永红, 余晓芬 等. 非扫描并行三维共焦检测技术综述[J]. 仪器仪表学报(增刊), 2003, 24(4): 8~11

    Wang Yonghong, Yu Xiaofen, et al.. A survey of the non-scanning 3-D profile confocal detecting [J ]. Chinese J. Scientific Instrument, 2003, 24(4): 8~11

[4] 胡茂海, 陶纯堪, 高万荣 等. 激光共焦扫描显微镜数据场的三维重建[J ]. 中国激光, 2002, 29(6): 573~575

    Hu Maohai, Tao Chunkan, Gao Wanrong, et al.. 3D reconstruction of data field of laser confocal scanning microscope [J ]. Chinese J. Lasers, 2002, 29(6): 573~575

[5] H. J. Tiziani, H. M. Uhde. Three-dimensional analysis by a microlens-array confocal arrangement [J]. Appl. Opt., 1994, 33(4): 567~572

[6] M. Ishihara, H. Sasaki. High-speed surface measurement using a nonscanning multiple-beam confocal microscope [J]. Opt. Engng., 1999, 38(6): 1035~1040

[7] 田维坚, 丁志华, 郭履容 等. 一种全场三维共焦检测的新方法[J]. 光学学报, 1998, 18(6): 757~761

    Tian Weijian, Ding Zhihua, Guo Lürong et al.. A confocal method for measuring whole-field three-dimentional surface topography [J]. Acta Optica Sinica, 1998, 18(6): 757~761

[8] 田维坚, 陈波, 郭履容 等. 并行共焦三维检测方法的理论分析[J]. 光学学报, 1999, 19(10): 1381~1385

    Tian Weijian, Chen Bo, Guo Lürong et al.. Theoretical analysis for parallel confocal detecting method [J]. Acta Optica Sinica, 1999, 19(10): 1381~1385

[9] 郁道银, 谈恒英. 工程光学[M].北京:机械工业出版社,1999. 267~273

    Yu Daoyin, Tan Hengying. Engineering Optics [M].Beijing:China Machine Press,1999. 267~273

[10] 韩超, 韦穗, 权希龙 等. 数字微镜器件的全息显示[J]. 中国激光, 2010, 37(1): 190~194

    Han Chao, Wei Sui, Quan Xilong et al.. Holographic display of digital micromirror device [J]. Chinese J. Lasers, 2010, 37(1): 190~194

[11] 王巍, 巩马理. 数字微镜器件(DMD)在相干光照明下的空间光调制特性[J]. 光电技术应用, 2007, 22(3): 31~35

    Wang Wei, Gong Mali. Spatial light modulating characters of digital micro mirror device (DMD) at laser illumination [J]. Electro-optic Technology Application, 2007, 22(3): 31~35

[12] 李俊昌, 宋庆和, 桂进斌. 数字微镜用于菲涅耳衍射全息显示的理论研究[J]. 光子学报, 2009, 38(6): 1459~1463

    Li Junchang, Song Qinghe, Gui Jinbin. Theory research on fresnel diffraction hologram display with DMD [J]. Acta Photonica Sinica, 2009, 38(6): 1459~1463

余卿, 余晓芬, 刘文文, 程伶俐. 数字微镜器件用于并行共焦测量的再研究[J]. 光学学报, 2011, 31(5): 0523005. Yu Qing, Yu Xiaofen, Liu Wenwen, Cheng Lingli. Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device[J]. Acta Optica Sinica, 2011, 31(5): 0523005.

本文已被 7 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!